Semiconductor optical waveguide element
EHATA TOSHIKI; SASAYA YUKIHIRO; NISHIWAKI YOSHIKAZU; MATSUOKA HARUJI
1982-11-02
著作权人SUMITOMO DENKI KOGYO KK
专利号JP1982178397A
国家日本
文献子类发明申请
其他题名Semiconductor optical waveguide element
英文摘要PURPOSE:To enable monolithic structure with every kind of semiconductor elements by forming plane multilayer structure formed by combining a high carrier concentration layer and a low carrier concentration layer, and a layer functioning as a waveguide layer. CONSTITUTION:Buffer layers 22 and waveguide layers 23 consists of N-AlY Ga1-YAs and N-AlXGa1-XAs of low carrier concentration (1-50X10cm), and substrates 24 in a figure a are obtained by growing N-AlZGa1-ZAs of high carrier concentration (1-50X10cm), to which Sn, Te, Se, Pb, etc. are doped, onto GaAs crystal substrates 25 of high carrier concentration in epitaxial shape. However, when Al concentration X, Y, Z(0<=X<1, 0
公开日期1982-11-02
申请日期1981-04-27
状态失效
内容类型专利
源URL[http://ir.opt.ac.cn/handle/181661/65968]  
专题半导体激光器专利数据库
作者单位SUMITOMO DENKI KOGYO KK
推荐引用方式
GB/T 7714
EHATA TOSHIKI,SASAYA YUKIHIRO,NISHIWAKI YOSHIKAZU,et al. Semiconductor optical waveguide element. JP1982178397A. 1982-11-02.
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