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	帶光檢測器的表面發射型半導体激光器，其制造方法以及用其制成的傳感器
	KATSUMI MORI; TAKAYUKI KONDO; TAKEO KANEKO
	2000-03-17
著作权人	精工愛普生株式會社
专利号	HK1004502A
国家	中国香港
文献子类	发明申请
其他题名	帶光檢測器的表面發射型半導体激光器，其制造方法以及用其制成的傳感器
英文摘要	A surface emission type semiconductor laser having an optical detector which can satisfactorily assure both the laser emission characteristics of the photoemitter and the optical-to-electrical conversion efficiency. The laser comprises a first conducting semiconductor layer and a second conducting semiconductor layer formed on first and second regions of a semiconductor substrate. Over the second conducting semiconductor layer on the first region is formed an optical resonator which emits light perpendicular to the plane of the semiconductor substrate. On the second region, at least one photodiode is formed by the first and second conducting semiconductor layers. On the first region the second conducting semiconductor layer is formed with a thickness of at least 1 µm, and is used as a lower electrode for supplying a current to the optical resonator. On the second region, the second conducting semiconductor layer forming the at least one photodiode is formed with a thickness of less than 1 µm after etching . The device can be used in a pressure sensor or in a position or displacement sensor.
公开日期	2000-03-17
申请日期	1998-04-30
状态	失效
内容类型	专利
源URL	[http://ir.opt.ac.cn/handle/181661/65382]
专题	半导体激光器专利数据库
作者单位	精工愛普生株式會社
推荐引用方式 GB/T 7714	KATSUMI MORI,TAKAYUKI KONDO,TAKEO KANEKO. 帶光檢測器的表面發射型半導体激光器，其制造方法以及用其制成的傳感器. HK1004502A. 2000-03-17.

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