Semiconductor laser array device and manufacture thereof | |
YOSHIKAWA AKIO; SUGINO TAKASHI | |
1986-01-27 | |
著作权人 | MATSUSHITA DENKI SANGYO KK |
专利号 | JP1986018189A |
国家 | 日本 |
文献子类 | 发明申请 |
其他题名 | Semiconductor laser array device and manufacture thereof |
英文摘要 | PURPOSE:To enable realization of a semiconductor laser array device which operates at a low threshold and is fabricated with a high degree of integration in a single crystal growth, by forming an active layer directly above recesses or projections so that the dimensions of the active layer in directions which are respectively parallel to the cavity resonator surface and the semiconductor junction surface are sufficient to provide two oscillation regions. CONSTITUTION:Stripe-shaped grooves are formed in the surface of a p type GaAs substrate 10 by chemical etching. Then, n type GaAs current blocking layers 11, 20 whose film thickness is smaller than the depth of the grooves are formed. A p type GaAs layer 12, a p type clad layer 13, an active layer 14, an n type clad layer 15 and an n type layer 16 are formed on the layers 11, 20. Although current concentrates on and near the part above each groove, as the current comes closer to the GaAs substrate 10, it diverges and flows along both side surfaces of the groove, thereby forming two laser oscillation regions within the groove. Thus, oscillations take place substantially simultaneously at or near a threshold of 70mA, and stable single transverse mode oscillation is obtained. The volume of each chip of this laser array is reduced to about half of that in a conventional laser array having the same number of laser oscillation regions. Thus, it is possible to reduce the size of the laser array device. |
公开日期 | 1986-01-27 |
申请日期 | 1984-07-05 |
状态 | 失效 |
内容类型 | 专利 |
源URL | [http://ir.opt.ac.cn/handle/181661/64826] ![]() |
专题 | 半导体激光器专利数据库 |
作者单位 | MATSUSHITA DENKI SANGYO KK |
推荐引用方式 GB/T 7714 | YOSHIKAWA AKIO,SUGINO TAKASHI. Semiconductor laser array device and manufacture thereof. JP1986018189A. 1986-01-27. |
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