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	Tapered air apertures for thermally robust vertical cavity laser structures
	COLDREN, LARRY A.; NAONE, RYAN L.
	2002-06-06
著作权人	NATIONAL SCIENCE FOUNDATION
专利号	US20020067748A1
国家	美国
文献子类	发明申请
其他题名	Tapered air apertures for thermally robust vertical cavity laser structures
英文摘要	A process for forming a Vertical Cavity Laser (VCL) structure that includes using an intermixing technique involving an high temperature annealing operation to overcome lateral carrier diffusion away from the center of the active region of the VCL. Degrading effects of the high temperature annealing are avoided by first restricting the dopant associated with the p-type Bragg reflector (DBR) region of the VCL to low diffusivity types such as carbon, thus eliminating a thermally-induced diffusion that occurs when other p-type dopants such as beryllium (Be), Zinc (Zn), or Magnesium (Mg) are employed. Further, the oxide created to act as an aperture in a conventional VCL structure is removed leaving behind an air gap having the shape of the oxide aperture. It was found that the degrading effects associated with annealing the VCL structure were minimized using carbon as the p-type dopant and air gap apertures. In addition, it was determined that the annealed, air gap apertured, VCL provided the same optical loss properties previously attributed only to an un-annealed, oxide-apertured, VCL-but without sacrificing efficiency due to lateral carrier diffusion.
公开日期	2002-06-06
申请日期	2000-12-01
状态	失效
内容类型	专利
源URL	[http://ir.opt.ac.cn/handle/181661/64158]
专题	半导体激光器专利数据库
作者单位	NATIONAL SCIENCE FOUNDATION
推荐引用方式 GB/T 7714	COLDREN, LARRY A.,NAONE, RYAN L.. Tapered air apertures for thermally robust vertical cavity laser structures. US20020067748A1. 2002-06-06.

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