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	Semiconductor laser integrated element
	TANAKA TOSHIAKI; KAJIMURA TAKASHI
	1990-08-17
著作权人	HITACHI LTD
专利号	JP1990207584A
国家	日本
文献子类	发明申请
其他题名	Semiconductor laser integrated element
英文摘要	PURPOSE:To measure or observe a far-field image and a transverse mode on a wafer by driving an optical detector element in an equal interval such that the distribution of a laser light emitted from a laser device can be monitored horizontally and vertically, and providing those divided optical detector elements on the same substrate as the laser device. CONSTITUTION:A striped semiconductor laser 1 and an optical detector element 3 are formed on the same semiconductor substrate in a monolithic manner. Herein, for the stripe width W1 of the semiconductor laser 1 and that W2 of the optical detector element 3, W1>W2 holds. Further, resonator end surfaces of the semiconductor laser 1 and the optical detection surface of the optical detector element 3 are formed, and simultaneously those elements are electrically isolated using a mask and dry processing such as reactive ion etching. The semiconductor laser 1 and the optical detector element 3 are arranged such that the optical detection surfaces of the optical detector element are parallely disposed around the stripe center, as the center of a circle, of the exit surface of the semiconductor laser
公开日期	1990-08-17
申请日期	1989-02-08
状态	失效
内容类型	专利
源URL	[http://ir.opt.ac.cn/handle/181661/62620]
专题	半导体激光器专利数据库
作者单位	HITACHI LTD
推荐引用方式 GB/T 7714	TANAKA TOSHIAKI,KAJIMURA TAKASHI. Semiconductor laser integrated element. JP1990207584A. 1990-08-17.

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