Optical displacement-detecting mechanism and probe microscope using the same
IYOKI, MASATO; YAMAMOTO, HIROYOSHI; WATANABE, KAZUTOSHI
2008-02-28
著作权人HITACHI HIGH-TECH SCIENCE CORPORATION
专利号US20080049223A1
国家美国
文献子类发明申请
其他题名Optical displacement-detecting mechanism and probe microscope using the same
英文摘要The optical displacement-detecting mechanism has: a light source for irradiating a target for measurement with light; a light source-driving circuit for driving the light source; an optical detector made from a semiconductor for receiving light after the irradiation of the target for measurement by the light source and converting the light into an electric signal thereby to detect an intensity of light; and an amplifier including a current-voltage conversion circuit for performing current-to-voltage conversion on a detection signal of the optical detector with a predetermined amplification factor. In the optical displacement-detecting mechanism, a light source having a spectrum half width of 10 nm or larger is used, whereby the light source can be driven with an output power of 2 mW or larger without generating mode hop noise and optical feedback noise.
公开日期2008-02-28
申请日期2007-08-17
状态授权
内容类型专利
源URL[http://ir.opt.ac.cn/handle/181661/62517]  
专题半导体激光器专利数据库
作者单位HITACHI HIGH-TECH SCIENCE CORPORATION
推荐引用方式
GB/T 7714
IYOKI, MASATO,YAMAMOTO, HIROYOSHI,WATANABE, KAZUTOSHI. Optical displacement-detecting mechanism and probe microscope using the same. US20080049223A1. 2008-02-28.
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