Surface-emitting laser element, surface-emitting laser array, optical scanning apparatus, image forming apparatus, and method of manufacturing surface-emitting laser element
HIGASHI, YASUHIRO; HARASAKA, KAZUHIRO
2012-04-12
著作权人RICOH COMPANY, LTD.
专利号US20120086765A1
国家美国
文献子类发明申请
其他题名Surface-emitting laser element, surface-emitting laser array, optical scanning apparatus, image forming apparatus, and method of manufacturing surface-emitting laser element
英文摘要A method of manufacturing a surface-emitting laser element having a light-emitting mesa structure with an emitting area including a high-reflectance portion and a low-reflectance portion includes forming a layered body that includes a lower reflecting mirror, a cavity structure, and an upper reflecting mirror on a substrate; forming a first area on an upper surface of the layered body; forming a second area having the same size as the first area on the upper surface of the layered body; forming a light-emitting mesa structure and a monitoring-mesa structure by etching the first area and the second area, respectively; forming a confinement structure including a current passage area surrounded by an oxide in the light-emitting mesa structure and the monitoring-mesa structure; and measuring the size of the current passage area of the monitoring-mesa structure.
公开日期2012-04-12
申请日期2010-05-26
状态授权
内容类型专利
源URL[http://ir.opt.ac.cn/handle/181661/61638]  
专题半导体激光器专利数据库
作者单位RICOH COMPANY, LTD.
推荐引用方式
GB/T 7714
HIGASHI, YASUHIRO,HARASAKA, KAZUHIRO. Surface-emitting laser element, surface-emitting laser array, optical scanning apparatus, image forming apparatus, and method of manufacturing surface-emitting laser element. US20120086765A1. 2012-04-12.
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