Verfahren und Vorrichtung zur Diagnostik und überwachung eines unfokussierten Laserstrahles von Hochleistungs-Laseranlagen
BEERSIEK JÖRG; BÖRGER PETER; KATRICH OLEXANDR; KATRYCH OLEKSIY; KLUFT WERNER; STRANG TORSTEN; WILBERS BURKHARD; ZIEMANN DETLEF
2003-01-02
著作权人PROMETEC GMBH
专利号DE10129274A1
国家德国
文献子类发明申请
其他题名Verfahren und Vorrichtung zur Diagnostik und überwachung eines unfokussierten Laserstrahles von Hochleistungs-Laseranlagen
英文摘要The invention relates to a method for measuring characteristic variables of a laser beam (LA) in z-direction, such as the position of the beam in the x and y direction, the beam radius, diameter of the beam or the semi-axes of the ellipses in the x and y-directions of the beams, beam output, beam polarisation etc. via at least two wire-grid planes (DG1 DG2) which are arranged behind each other in the path of the beams and twisted in relation to each other, each one thereof being provided with wires (D1 Dn) which are arranged next to each other on the grid plane thereof. Said wires absorb a small fraction of the laser beams and increase the electrical resistance thereof. The characteristic quantities of the laser beams are calculated according to the increase in resistance of the wires of the grid planes, which therefore become measuring grid planes (DG1 - DGn). The inventive method is characterised in that the measuring grid receives a flow of gas (GS) and is cooled therewith.
公开日期2003-01-02
申请日期2001-06-18
状态失效
内容类型专利
源URL[http://ir.opt.ac.cn/handle/181661/60672]  
专题半导体激光器专利数据库
作者单位PROMETEC GMBH
推荐引用方式
GB/T 7714
BEERSIEK JÖRG,BÖRGER PETER,KATRICH OLEXANDR,et al. Verfahren und Vorrichtung zur Diagnostik und überwachung eines unfokussierten Laserstrahles von Hochleistungs-Laseranlagen. DE10129274A1. 2003-01-02.
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