QQ客服 官方微博 反馈留言

	Micro-machine operating method and phot0-drive micro-machine
	KAWADA SATOSHI; MINAMI SHIGEO; SUGIURA TADAO
	1992-09-29
著作权人	KAWADA SATOSHI
专利号	JP1992272481A
国家	日本
文献子类	发明申请
其他题名	Micro-machine operating method and phot0-drive micro-machine
英文摘要	PURPOSE:To eliminate provision of any electrode for driving and perform the drive of moving piece contactlessly and by non-power means by installing a minute moving piece on the base board of a micro-machine, allowing this moving piece to receive at least one electromagnetic wave beam having a high energy density, and thereby putting the moving piece afloat. CONSTITUTION:With the Si micro-machining technique, an electric machine system in the order of microns is fabricated using semiconductor minute processing techniques. To operate a micro-machine in which a minute moving piece 3 is installed on a base board, the moving piece 3 is allowed to receive at least one electromagnetic wave beam having a high energy density, and thereby the piece 3 is put afloat. For example, the moving piece 3 with the base board 2 subjected to minute processing is irradiated with a laser beam 1 which has been condensed by a lens. Now forces in x, y, z directions act on this moving piece 3 owing to unevenness in the intensity distribution of laser beam 1 and also the difference in the intensity distribution between this and the laser beam 1 condensed point. As a result, the moving piece 3 is put afloat from the base board 2 and comes into standstill in a certain balancing position.
公开日期	1992-09-29
申请日期	1990-12-25
状态	失效
内容类型	专利
源URL	[http://ir.opt.ac.cn/handle/181661/59705]
专题	半导体激光器专利数据库
作者单位	KAWADA SATOSHI
推荐引用方式 GB/T 7714	KAWADA SATOSHI,MINAMI SHIGEO,SUGIURA TADAO. Micro-machine operating method and phot0-drive micro-machine. JP1992272481A. 1992-09-29.

个性服务

查看访问统计

相关权益政策

暂无数据

收藏/分享

除非特别说明，本系统中所有内容都受版权保护，并保留所有权利。