Iii-v chip preparation and integration in silicon photonics
LAMBERT, DAMIEN
2017-11-16
著作权人SKORPIOS TECHNOLOGIES, INC.
专利号WO2017197132A1
国家世界知识产权组织
文献子类发明申请
其他题名Iii-v chip preparation and integration in silicon photonics
英文摘要A composite semiconductor laser is made by securing a III-V wafer to a transfer wafer. A substrate of the III-V wafer is removed, and the III-V wafer is etched into a plurality of chips while the III-V wafer is secured to the transfer wafer. The transfer wafer is singulated. A portion of the transfer wafer is used as a handle for bonding the chip in a recess of a silicon device. The chip is used as a gain medium for the semiconductor laser.
公开日期2017-11-16
申请日期2017-05-11
状态未确认
内容类型专利
源URL[http://ir.opt.ac.cn/handle/181661/57581]  
专题半导体激光器专利数据库
作者单位SKORPIOS TECHNOLOGIES, INC.
推荐引用方式
GB/T 7714
LAMBERT, DAMIEN. Iii-v chip preparation and integration in silicon photonics. WO2017197132A1. 2017-11-16.
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