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	Microfabrication techniques and devices for thermal management of electronic devices
	GHONEIM, MOHAMED TAREK; HUSSAIN, MUHAMMAD MUSTAFA
	2019-08-08
著作权人	KING ABDULLAH UNIVERSITY OF SCIENCE AND TECHNOLOGY
专利号	US20190244832A1
国家	美国
文献子类	发明申请
其他题名	Microfabrication techniques and devices for thermal management of electronic devices
英文摘要	A method of fabricating a thermal management device. The method includes depositing a seed layer, using a seed layer depositing technique, on a side of a support base; growing a heat sink base layer on a side of the seed layer; depositing a hard mask on a side of the support base directly opposite that containing the seed and heat sink base layers; patterning the hard mask with a photoresist mask; etching the patterned hard mask with an etching technique, wherein the etching creates trenches in the underlying support base, exposing the seed layer; removing the hard mask with a hard mask removal technique; depositing a layer of photoresist on the heat sink base layer; growing heat sinks using a heat sink growth technique on the exposed seed layer; removing the photoresist layer with a photoresist layer removal technique; and removing the support base with a support base removal technique.
公开日期	2019-08-08
申请日期	2017-10-04
状态	申请中
内容类型	专利
源URL	[http://ir.opt.ac.cn/handle/181661/54824]
专题	半导体激光器专利数据库
作者单位	KING ABDULLAH UNIVERSITY OF SCIENCE AND TECHNOLOGY
推荐引用方式 GB/T 7714	GHONEIM, MOHAMED TAREK,HUSSAIN, MUHAMMAD MUSTAFA. Microfabrication techniques and devices for thermal management of electronic devices. US20190244832A1. 2019-08-08.

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