Microstructure, mechanical and tribological properties of Si and Al co-doped hydrogenated amorphous carbon films deposited at various bias voltages

CORC > 兰州化学物理研究所 > 中国科学院兰州化学物理研究所 > 固体润滑国家重点实验室

	Microstructure, mechanical and tribological properties of Si and Al co-doped hydrogenated amorphous carbon films deposited at various bias voltages
	Liu XQ(刘小强)1,2 ; Yang J(杨军)1 ; Hao JY(郝俊英)1 ; Zheng JY(郑建云)1,2 ; Gong QY(龚秋雨)1,2 ; Liu WM(刘维民)1 ; Hao JY(郝俊英)
刊名	Surface & Coatings Technology
	2012
卷号	206 期号:19-20 页码:4119-4125
关键词	Bias voltage Magnetron sputtering Surface morphology Wear resistance Super-low friction Amorphous carbon film
ISSN号	0257-8972
通讯作者	郝俊英
英文摘要	Hydrogenated amorphous carbon films containing Si and Al (a-C:H/(Si, Al)) were deposited on Si(100) substrates at different negative bias voltages, by radio frequency (RF, 13.56 MHz) magnetron sputtering. The chemical composition and structure were detected by means of X-ray photoelectron spectroscopy (XPS) and Raman spectra, respectively. It was found from the results of Raman spectra that the film deposited at zero negative bias voltage was highly hydrogenated, but significant graphitization happened to the films when high bias voltages were applied. The results of atomic force microscope (AFM) showed that the films deposited at moderate negative bias voltage had ultra-smooth surface. The mechanical and tribological properties of the films were measured by nano-indentation test and tribo-meter in ball-on-disk mode, respectively. It was revealed that the negative bias voltage had great impacts on the mechanical properties of the films. The tribological properties of the films were significantly improved when bias voltages were applied on substrates. Particularly, the film deposited at − 200 V performed a super-low friction behavior (0.0085) and long wear life (> 10⁵ revolutions) in ambient air under high Hertz contact stress (as high as 1.6 GPa) though it showed a relatively low hardness.
学科主题	材料科学与物理化学
收录类别	SCI
资助信息	the National Natural Science Foundation of China (grant no. 50905177)
语种	英语
WOS记录号	WOS:000305662400042
公开日期	2013-07-12
内容类型	期刊论文
源URL	[http://210.77.64.217/handle/362003/3472]
专题	兰州化学物理研究所_固体润滑国家重点实验室
通讯作者	Hao JY(郝俊英)
作者单位	1.Chinese Acad Sci, Lanzhou Inst Chem Phys, State Key Lab Solid Lubricat, Lanzhou 730000, Peoples R China 2.Chinese Acad Sci, Grad Univ, Beijing 100049, Peoples R China
推荐引用方式 GB/T 7714	Liu XQ,Yang J,Hao JY,et al. Microstructure, mechanical and tribological properties of Si and Al co-doped hydrogenated amorphous carbon films deposited at various bias voltages[J]. Surface & Coatings Technology,2012,206(19-20):4119-4125.
APA	Liu XQ.,Yang J.,Hao JY.,Zheng JY.,Gong QY.,...&郝俊英.(2012).Microstructure, mechanical and tribological properties of Si and Al co-doped hydrogenated amorphous carbon films deposited at various bias voltages.Surface & Coatings Technology,206(19-20),4119-4125.
MLA	Liu XQ,et al."Microstructure, mechanical and tribological properties of Si and Al co-doped hydrogenated amorphous carbon films deposited at various bias voltages".Surface & Coatings Technology 206.19-20(2012):4119-4125.