QQ客服 官方微博 反馈留言

	Apparatus and methods for micro-transfer printing
	BOWER, CHRISTOPHER; MEITL, MATTHEW; KNEEBURG, DAVID; GOMEZ, DAVID; BONAFEDE, SALVATORE
	2016-03-24
著作权人	X-CELEPRINT LIMITED
专利号	WO2016012409A3
国家	世界知识产权组织
文献子类	发明申请
其他题名	Apparatus and methods for micro-transfer printing
英文摘要	An appartus and method for assembling a semiconductor device on a destination substrate using micro-transfer-printing is described. A conformable transfer device (102) such as an elastomer or visco-elastomer stamp includes an array of posts (114) for picking up printable semiconductor elements (104) from a native substrate (108) which is used for fabricating the printable semiconductor elements (104) and transferring the printable semiconductor elements (104) to a destination substrate (110). In certain embodiments, the printable semiconductor elements (104) are encapsulated in a polymer layer (106) before they are picked up. In certain embodiments a plasma treatment (e.g. atmospheric plasma) can be performed during micro transfer printing. The plasma can be applied to bottom surfaces of devices that are attached to an elastomer transfer-element. This treatment of bottom surfaces can be used to provide improved bonding between the devices and destination substrate, to clean the bottom surface of devices that have been fabricated using epitaxial lift-off methods, and to remove thin layers of oxides. In certain embodiments, if the devices have a backside metal, the semiconductor elements are printed to a destination substrate with mating metal pads that have been coated with a flux. After transferring the devices, the flux can be reflowed thereby leaving a good metal connection between the pads and the backside metal on the devices. In certain embodiments, the disclosed technology includes transfer devices designed to eliminate or reduce issues related to crowning. In certain embodiments, the crown is cut with a razor so that printable semiconductor elements are not picked up by the crown during a print operation.
公开日期	2016-03-24
申请日期	2015-07-20
状态	未确认
内容类型	专利
源URL	[http://ir.opt.ac.cn/handle/181661/54608]
专题	半导体激光器专利数据库
作者单位	X-CELEPRINT LIMITED
推荐引用方式 GB/T 7714	BOWER, CHRISTOPHER,MEITL, MATTHEW,KNEEBURG, DAVID,et al. Apparatus and methods for micro-transfer printing. WO2016012409A3. 2016-03-24.

个性服务

查看访问统计

相关权益政策

暂无数据

收藏/分享

除非特别说明，本系统中所有内容都受版权保护，并保留所有权利。