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	Micromachined torsional mirror unit for optical switching and fabrication method therefor
	DE ROOIJ, NICOLAAS F.; NOELL, WILFRIED; SHAN, XUECHUAN; WANG, ZHENFENG; WANG, ZHIPING
	2003-10-27
著作权人	SINGAPORE INSTITUTE OF MANUFACTURING TECHNOLOGY
专利号	AU2002251666A1
国家	澳大利亚
文献子类	发明申请
其他题名	Micromachined torsional mirror unit for optical switching and fabrication method therefor
英文摘要	An optical switch (402) formed on a substrate and a fabrication method therefor are disclosed. The optical switch (402) comprises a mirror (404) disposed substantially upright in relation to a substrate (414), the mirror (404) being rotatably displaceable about a pivot between a first position and a position angularly displaced from the first position. The optical switch also comprises a comb drive actuator, which includes a stationary comb (408) anchored to the substrate in a position substantially parallel to the plane of the substrate (414), and a displaceable comb (406) interleaved with the stationary comb (408) and coupled to the mirror (404) in a position substantially coplanar with the stationary comb (408) and substantially perpendicular to the plane of the mirror (404). In the optical switch (402), the stationary and displaceable combs (408, 406) are capable of applying a force for rotatably displacing the mirror (404) to one of the first position and position angularly displaced from the first position.
公开日期	2003-10-27
申请日期	2002-03-30
状态	失效
内容类型	专利
源URL	[http://ir.opt.ac.cn/handle/181661/52688]
专题	半导体激光器专利数据库
作者单位	SINGAPORE INSTITUTE OF MANUFACTURING TECHNOLOGY
推荐引用方式 GB/T 7714	DE ROOIJ, NICOLAAS F.,NOELL, WILFRIED,SHAN, XUECHUAN,et al. Micromachined torsional mirror unit for optical switching and fabrication method therefor. AU2002251666A1. 2003-10-27.

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