Method for fabrication of vertically coupled integrated optical structures | |
HRYNIEWICZ, JOHN; ABSIL, PHILIPPE; LITTLE, BRENT; KING, OLIVER; HO, PING-TONG | |
2002-02-07 | |
著作权人 | UNIVERSITY OF MARYLAND, COLLEGE PARK |
专利号 | WO2002010814A1 |
国家 | 世界知识产权组织 |
文献子类 | 发明申请 |
其他题名 | Method for fabrication of vertically coupled integrated optical structures |
英文摘要 | A manufacturing process is provided for fabrication of vertically coupled integrated photonic devices by projection lithographic technique. A multi-layered structure (10) is formed which includes a pair of core waveguiding layers (14, 16) separated by a coupling interlayer (15) and sandwiched between cladding layers (13, 17). Prior to forming optical features in the core layers, alignment marks (18) are etched completely through the whole multi-layered structure with the alignment marks being visible on both sides of the multi-layered structure to a conventional projection stepper. After the alignment marks are formed, a "bottom level" optical features are made through the bottom cladding layer, bottom core layer, and portion of intervening coupling layer. The formed sample is then bonded by a polymer to a carrier and a "top level" optical features are defined through the top cladding, top core layer, and portion of the intervening coupling layer. |
公开日期 | 2002-02-07 |
申请日期 | 2001-03-05 |
状态 | 未确认 |
内容类型 | 专利 |
源URL | [http://ir.opt.ac.cn/handle/181661/52376] ![]() |
专题 | 半导体激光器专利数据库 |
作者单位 | UNIVERSITY OF MARYLAND, COLLEGE PARK |
推荐引用方式 GB/T 7714 | HRYNIEWICZ, JOHN,ABSIL, PHILIPPE,LITTLE, BRENT,et al. Method for fabrication of vertically coupled integrated optical structures. WO2002010814A1. 2002-02-07. |
个性服务 |
查看访问统计 |
相关权益政策 |
暂无数据 |
收藏/分享 |
除非特别说明,本系统中所有内容都受版权保护,并保留所有权利。
修改评论