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	Method for fabrication of vertically coupled integrated optical structures
	HRYNIEWICZ, JOHN; ABSIL, PHILIPPE; LITTLE, BRENT; KING, OLIVER; HO, PING-TONG
	2002-02-07
著作权人	UNIVERSITY OF MARYLAND, COLLEGE PARK
专利号	WO2002010814A1
国家	世界知识产权组织
文献子类	发明申请
其他题名	Method for fabrication of vertically coupled integrated optical structures
英文摘要	A manufacturing process is provided for fabrication of vertically coupled integrated photonic devices by projection lithographic technique. A multi-layered structure (10) is formed which includes a pair of core waveguiding layers (14, 16) separated by a coupling interlayer (15) and sandwiched between cladding layers (13, 17). Prior to forming optical features in the core layers, alignment marks (18) are etched completely through the whole multi-layered structure with the alignment marks being visible on both sides of the multi-layered structure to a conventional projection stepper. After the alignment marks are formed, a "bottom level" optical features are made through the bottom cladding layer, bottom core layer, and portion of intervening coupling layer. The formed sample is then bonded by a polymer to a carrier and a "top level" optical features are defined through the top cladding, top core layer, and portion of the intervening coupling layer.
公开日期	2002-02-07
申请日期	2001-03-05
状态	未确认
内容类型	专利
源URL	[http://ir.opt.ac.cn/handle/181661/52376]
专题	半导体激光器专利数据库
作者单位	UNIVERSITY OF MARYLAND, COLLEGE PARK
推荐引用方式 GB/T 7714	HRYNIEWICZ, JOHN,ABSIL, PHILIPPE,LITTLE, BRENT,et al. Method for fabrication of vertically coupled integrated optical structures. WO2002010814A1. 2002-02-07.

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