QQ客服 官方微博 反馈留言

	Apparatus and method for fabricating a curved grating in a surface emitting distributed feedback semiconductor laser diode device
	MACOMBER, STEVEN H.
	1994-04-26
著作权人	B.F. GOODRICH COMPANY, THE
专利号	US5307183
国家	美国
文献子类	授权发明
其他题名	Apparatus and method for fabricating a curved grating in a surface emitting distributed feedback semiconductor laser diode device
英文摘要	An apparatus 10 for exposing a curved grating pattern of monochromatic light on a photoresist coated semiconductor wafer 12 includes an argon gas laser 14 that outputs a monochromatic light beam 16. This monochromatic light beam 16 is filtered and collimated to produce a monochromatic light beam with a planar wavefront 24. A portion of this planar wavefront passes through a cylindrical lens array 26 and a first baffle slit 30, producing multiple cylindrical wavefront 34 that is incident upon a hypotenuse face 38 of a right angle prism 40. Another portion of the planar wavefront passes through a second baffle slit 32, producing a smaller planar wavefront 36 that is also incident upon the hypotenuse face 38 of the right angle prism 40. A destructive interference between a reflected multiple cylindrical wavefront 92 and a direct planar wavefront 90 inside the prism 40 produces a curved grating pattern of monochromatic light on an adjacent prism face 42. This curved grating pattern of monochromatic light is projected toward the semiconductor wafer 12, thereby exposing the photoresist coated wafer surface 48 with the curved grating pattern.
公开日期	1994-04-26
申请日期	1992-11-12
状态	失效
内容类型	专利
源URL	[http://ir.opt.ac.cn/handle/181661/47411]
专题	半导体激光器专利数据库
作者单位	B.F. GOODRICH COMPANY, THE
推荐引用方式 GB/T 7714	MACOMBER, STEVEN H.. Apparatus and method for fabricating a curved grating in a surface emitting distributed feedback semiconductor laser diode device. US5307183. 1994-04-26.

个性服务

查看访问统计

相关权益政策

暂无数据

收藏/分享

除非特别说明，本系统中所有内容都受版权保护，并保留所有权利。