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	Method of making a nonplanar buried-heterostructure distributed-feedback laser
	DOLAN, GERALD J.; LOGAN, RALPH A.; TEMKIN, HENRYK; WILT, DANIEL P.
	1987-10-27
著作权人	BELL TELEPHONE LABORATORIES, INCORPORATED
专利号	US4701995
国家	美国
文献子类	授权发明
其他题名	Method of making a nonplanar buried-heterostructure distributed-feedback laser
英文摘要	A buried-heterostructure distributed feedback laser is described, including a grating structure at a surface of a nonplanar cladding layer. The grating structure can be made by transfer of a pattern by ion milling, the pattern being defined in an ion-beam resist layer, e.g., by direct-writing electron-beam exposure. Low-threshold, high-power lasers are obtained with a commercially favorable yield.
公开日期	1987-10-27
申请日期	1986-10-29
状态	失效
内容类型	专利
源URL	[http://ir.opt.ac.cn/handle/181661/47344]
专题	半导体激光器专利数据库
作者单位	BELL TELEPHONE LABORATORIES, INCORPORATED
推荐引用方式 GB/T 7714	DOLAN, GERALD J.,LOGAN, RALPH A.,TEMKIN, HENRYK,et al. Method of making a nonplanar buried-heterostructure distributed-feedback laser. US4701995. 1987-10-27.

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