Vertical cavity surface emitting laser having multiple top-side contacts
JOHNSON, RALPH H.; PENNER, R. SCOTT; BIARD, JAMES ROBERT; FITZGERALD, COLBY
2012-06-05
著作权人FINISAR CORPORATION
专利号US8193019
国家美国
文献子类授权发明
其他题名Vertical cavity surface emitting laser having multiple top-side contacts
英文摘要A VCSEL with undoped mirrors. An essentially undoped bottom DBR mirror is formed on a substrate. A periodically doped first conduction layer region is formed on the bottom DBR mirror. The first conduction layer region is heavily doped at a location where the optical electric field is at about a minimum. An active layer, including quantum wells, is on the first conduction layer region. A periodically doped second conduction layer region is connected to the active layer. The second conduction layer region is heavily doped where the optical electric field is at a minimum. An aperture is formed in the epitaxial structure above the quantum wells. A top mirror coupled to the periodically doped second conduction layer region. The top mirror is essentially undoped and formed in a mesa structure. An oxide is formed around the mesa structure to protect the top mirror during wet oxidation processes.
公开日期2012-06-05
申请日期2010-11-01
状态授权
内容类型专利
源URL[http://ir.opt.ac.cn/handle/181661/47037]  
专题半导体激光器专利数据库
作者单位FINISAR CORPORATION
推荐引用方式
GB/T 7714
JOHNSON, RALPH H.,PENNER, R. SCOTT,BIARD, JAMES ROBERT,et al. Vertical cavity surface emitting laser having multiple top-side contacts. US8193019. 2012-06-05.
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