Vertical cavity surface emitting laser having multiple top-side contacts | |
JOHNSON, RALPH H.; PENNER, R. SCOTT; BIARD, JAMES ROBERT; FITZGERALD, COLBY | |
2012-06-05 | |
著作权人 | FINISAR CORPORATION |
专利号 | US8193019 |
国家 | 美国 |
文献子类 | 授权发明 |
其他题名 | Vertical cavity surface emitting laser having multiple top-side contacts |
英文摘要 | A VCSEL with undoped mirrors. An essentially undoped bottom DBR mirror is formed on a substrate. A periodically doped first conduction layer region is formed on the bottom DBR mirror. The first conduction layer region is heavily doped at a location where the optical electric field is at about a minimum. An active layer, including quantum wells, is on the first conduction layer region. A periodically doped second conduction layer region is connected to the active layer. The second conduction layer region is heavily doped where the optical electric field is at a minimum. An aperture is formed in the epitaxial structure above the quantum wells. A top mirror coupled to the periodically doped second conduction layer region. The top mirror is essentially undoped and formed in a mesa structure. An oxide is formed around the mesa structure to protect the top mirror during wet oxidation processes. |
公开日期 | 2012-06-05 |
申请日期 | 2010-11-01 |
状态 | 授权 |
内容类型 | 专利 |
源URL | [http://ir.opt.ac.cn/handle/181661/47037] ![]() |
专题 | 半导体激光器专利数据库 |
作者单位 | FINISAR CORPORATION |
推荐引用方式 GB/T 7714 | JOHNSON, RALPH H.,PENNER, R. SCOTT,BIARD, JAMES ROBERT,et al. Vertical cavity surface emitting laser having multiple top-side contacts. US8193019. 2012-06-05. |
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