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	Fabrication of multiple-wavelength vertical-cavity opto-electronic device arrays
	YUEN, WUPEN; CHANG-HASNAIN, CONSTANCE J.; LI, GABRIEL S.
	2001-01-16
著作权人	THE REGENTS OF THE UNIVERSITY OF CALIFORNIA
专利号	US6174749
国家	美国
文献子类	授权发明
其他题名	Fabrication of multiple-wavelength vertical-cavity opto-electronic device arrays
英文摘要	The present invention provides multiple-wavelength vertical-cavity surface-emitting laser ("MW-VCSEL") arrays. These arrays are fabricated in a molecular beam epitaxy system or the like using two patterned-substrate growth techniques. The growth techniques can be used with an in-situ laser reflectometry. In one embodiment, a temperature dependent growth rate to create the devices is provided. In an alternative aspect, uniform growth is performed followed by a temperature-dependent desorption technique. These techniques provided desired wavelength span and desired characteristics.
公开日期	2001-01-16
申请日期	1998-05-13
状态	失效
内容类型	专利
源URL	[http://ir.opt.ac.cn/handle/181661/46833]
专题	半导体激光器专利数据库
作者单位	THE REGENTS OF THE UNIVERSITY OF CALIFORNIA
推荐引用方式 GB/T 7714	YUEN, WUPEN,CHANG-HASNAIN, CONSTANCE J.,LI, GABRIEL S.. Fabrication of multiple-wavelength vertical-cavity opto-electronic device arrays. US6174749. 2001-01-16.

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