Integrated semiconductor laser suitable for liquid-phase growth and method of fabricating same
FURUKAWA, RYOZO OKI ELECTRIC INDUSTRY CO., LTD.; SHINOZAKI, KEISUKE OKI ELECTRIC INDUSTRY CO., LTD.; FUKUNAGA, TOSHIAKI OKI ELECTRIC INDUSTRY CO., LTD.
1993-11-10
著作权人OKI ELECTRIC INDUSTRY COMPANY, LIMITED
专利号EP0351839B1
国家欧洲专利局
文献子类授权发明
其他题名Integrated semiconductor laser suitable for liquid-phase growth and method of fabricating same
英文摘要An integrated phase-locked semiconductor laser wherein a plurality of waveguide paths extend in parallel to each other. A current blocking layer (2) is formed on one of opposite major surfaces of a semiconductor substrate (1) and is divided into a plurality of regions by a plurality of stripe-like channels (11). Each of the channels (11) has a depth which reaches at least the above-­mentioned major surface of the substrate (1). A first cladding layer (3) covers the surface of the current blocking layer (2) and those regions of the substrate (1) which are exposed to the channels (11). A waveguide layer (4) is deposited on the first cladding layer (3) and has a surface opposite to the first cladding layer (3) which is substantially flat. An active layer (5), a reflecting layer (6), a second cladding layer (7) and a cap layer (8) are deposited one upon another on the waveguide layer (4). The waveguide layer (4) has an effective refractive index which sequentially decreases in the order of first regions (4-1) individually associated with the plurality of channels (11), second regions (4-2) individually associated with interchannel regions each intervening between nearby channels (11), and third regions (4-3) located at opposite sides of the plurality of channels (11) relatively to each other.
公开日期1993-11-10
申请日期1989-07-20
状态失效
内容类型专利
源URL[http://ir.opt.ac.cn/handle/181661/46142]  
专题半导体激光器专利数据库
作者单位OKI ELECTRIC INDUSTRY COMPANY, LIMITED
推荐引用方式
GB/T 7714
FURUKAWA, RYOZO OKI ELECTRIC INDUSTRY CO., LTD.,SHINOZAKI, KEISUKE OKI ELECTRIC INDUSTRY CO., LTD.,FUKUNAGA, TOSHIAKI OKI ELECTRIC INDUSTRY CO., LTD.. Integrated semiconductor laser suitable for liquid-phase growth and method of fabricating same. EP0351839B1. 1993-11-10.
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