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	Method of characterizing optical parameters of opto-electronic components and apparatus for carrying out the method, particularly during a coating operation
	IDLER, WILFRIED
	1993-10-12
著作权人	ALCATEL N.V.
专利号	US5252497
国家	美国
文献子类	授权发明
其他题名	Method of characterizing optical parameters of opto-electronic components and apparatus for carrying out the method, particularly during a coating operation
英文摘要	In the commonly used methods for the coating of opto-electronic components, especially of semiconductor lasers, the layer thickness of a layer that is to be deposited is measured optically. The optical signal is converted into an electrical one with which the coating is controlled. The invention relates to the purely electrical interpretation of the high frequency component of the electrical noise power of an opto-electronic component (3) when a direct current passes through it. From the noise power, a controlling computer (10) derives a signal for control of the layer thickness; this is fed into a coating apparatus (14) of a coating reactor (2) which has a reacting chamber (1) containing the component (3) to be coated.
公开日期	1993-10-12
申请日期	1991-08-01
状态	失效
内容类型	专利
源URL	[http://ir.opt.ac.cn/handle/181661/46058]
专题	半导体激光器专利数据库
作者单位	ALCATEL N.V.
推荐引用方式 GB/T 7714	IDLER, WILFRIED. Method of characterizing optical parameters of opto-electronic components and apparatus for carrying out the method, particularly during a coating operation. US5252497. 1993-10-12.

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