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	Distributed feedback laser device and method for manufacturing the same
	TAKIGUCHI, TOHRU; HANAMAKI, YOSHIHIKO
	2004-01-06
著作权人	MITSUBISHI DENKI KABUSHIKI KAISHA
专利号	US6674784
国家	美国
文献子类	授权发明
其他题名	Distributed feedback laser device and method for manufacturing the same
英文摘要	A distributed feedback laser device includes a semiconductor base having a ridge waveguide structure projecting from its principal plane. The ridge waveguide structure extends with a predetermined width from one edge of the semiconductor base to an opposite edge. A diffraction grating layer is confined within the ridge structure. The ridge waveguide structure is formed by etching using an SiO2 film and a resist film as masks so that the diffraction grating layer is produced with substantially the same width as, or a less width than, the width of the ridge waveguide structure. A lambda/4 shift diffraction grating or a chirped diffraction grating is preferably employed.
公开日期	2004-01-06
申请日期	2001-05-22
状态	授权
内容类型	专利
源URL	[http://ir.opt.ac.cn/handle/181661/45934]
专题	半导体激光器专利数据库
作者单位	MITSUBISHI DENKI KABUSHIKI KAISHA
推荐引用方式 GB/T 7714	TAKIGUCHI, TOHRU,HANAMAKI, YOSHIHIKO. Distributed feedback laser device and method for manufacturing the same. US6674784. 2004-01-06.

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