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	Fabrication of scanning III-V compound light emitters integrated with Si-based actuators
	SUN, DECAI; BRINGANS, ROSS D.; CHUA, CHRISTOPHER L.; FLOYD, PHILIP D.; PEETERS, ERIC; KUBBY, JOEL A.; TRAN, ALEX T.
	2000-04-25
著作权人	XEROX CORPORATION
专利号	US6054335
国家	美国
文献子类	授权发明
其他题名	Fabrication of scanning III-V compound light emitters integrated with Si-based actuators
英文摘要	A III-V compound light emitter is integrated with Si-based actuators. The Proposed devices take advantage of the superior optical properties of III-V compounds and the superior mechanical properties of Si, as well as mature fabrication technologies of Si-Micro-Electro-Mechanical Systems (MEMS). The emitter can be a light emitting diode (LED), a vertical cavity surface emitting laser (VCSEL) or an edge emitting laser. Electro or magnetic based actuation from Si-based actuators provides linear or angular movement of the light emitter.
公开日期	2000-04-25
申请日期	1998-12-11
状态	失效
内容类型	专利
源URL	[http://ir.opt.ac.cn/handle/181661/44742]
专题	半导体激光器专利数据库
作者单位	XEROX CORPORATION
推荐引用方式 GB/T 7714	SUN, DECAI,BRINGANS, ROSS D.,CHUA, CHRISTOPHER L.,et al. Fabrication of scanning III-V compound light emitters integrated with Si-based actuators. US6054335. 2000-04-25.

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