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	Mountable microstructure and optical transmission apparatus
	KONDO, TAKAYUKI; SHIMODA, TATSUYA
	2004-05-04
著作权人	SEIKO EPSON CORPORATION
专利号	US6730990
国家	美国
文献子类	授权发明
其他题名	Mountable microstructure and optical transmission apparatus
英文摘要	A mountable microstructure is provided for mounting with high positional accuracy a compound semiconductor element such as a surface emitting laser element engaged under gravity in concavities on an upper surface of a substrate. A surface emitting laser element 2 is formed on an upper surface of a Si block 1 formed at high accuracy in the same shape as concavities on the upper surface of a substrate by Si anisotropic etching. In the case of a surface emitting laser, since problems such as lattice mismatch occur when an epitaxial layer is grown on the Si substrate, the epitaxial layer 14 is grown on for example a GaAs substrate 11, and this is inverted to bond onto an Si substrate 17. Then after forming the surface emitting laser element 2, the Si block is shaped and divided up by anisotropic etching. Other elements may be formed on the Si block, however, in order to individually drive compound semiconductor elements, a high resistance layer 23 or a current blocking layer 24 is installed in an internal layer 22 between the two. If electrodes are provided on the upper surface of the Si substrate 17, prober inspection is facilitated.
公开日期	2004-05-04
申请日期	2001-06-29
状态	失效
内容类型	专利
源URL	[http://ir.opt.ac.cn/handle/181661/44514]
专题	半导体激光器专利数据库
作者单位	SEIKO EPSON CORPORATION
推荐引用方式 GB/T 7714	KONDO, TAKAYUKI,SHIMODA, TATSUYA. Mountable microstructure and optical transmission apparatus. US6730990. 2004-05-04.

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