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	Method for manufacturing an optical device
	PARK, KYUNG-HYUN; KIM, JONG-HOI; BAEK, YONG-SOON; PARK, MOON-HO; KIM, SUNG-BOCK; OH, KWANG-RYONG
	2003-10-28
著作权人	ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE
专利号	US6639735
国家	美国
文献子类	授权发明
其他题名	Method for manufacturing an optical device
英文摘要	Disclosed is a method for the fabrication of a spot-size converter with a lateral-tapered waveguide (or an active layer), which utilizes a mask during a lithographic process wherein the mask has a pad that can absorb strain to be occurred during forming a lateral-tapered waveguide pattern at its distal end and the lateral-tapered waveguide is fabricated by forming the distal end on the order of about 0.6 mum in width followed by forming the lateral-tapered waveguide on the order of 0.1 mum using an wet etching. Thus, it is possible to reduce a fabrication cost because it is free from a high-resolution electron beam lithography and a stepper, and hence enhance a reproducibility of the lateral-tapered waveguide because it is free from an excessive wet etching during the use of a contact exposure equipment. Further, it is possible to integrate the spot-size converter fabricated by the above with an optical device, resulting in an increased position adjustment and reproducibility of the spot-size converter, which in turn, leads to increase in yield for the optical device.
公开日期	2003-10-28
申请日期	2001-08-10
状态	失效
内容类型	专利
源URL	[http://ir.opt.ac.cn/handle/181661/44499]
专题	半导体激光器专利数据库
作者单位	ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE
推荐引用方式 GB/T 7714	PARK, KYUNG-HYUN,KIM, JONG-HOI,BAEK, YONG-SOON,et al. Method for manufacturing an optical device. US6639735. 2003-10-28.

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