Growth of high quality semi-insulating InP single crystal by suppression of compensation defects | |
Zhao, YW ; Dong, ZY ; Duan, ML ; Sun, WR ; Yang, ZX | |
2006 | |
会议名称 | 3rd asian conference on crystal growth and crystal technology (cgct-3) |
会议日期 | oct 16-19, 2005 |
会议地点 | beijing, peoples r china |
关键词 | indium phosphide |
页码 | 24: 75-77 sp. iss. si |
通讯作者 | zhao, yw, chinese acad sci, inst semicond, beijing 100083, peoples r china. 电子邮箱地址: zhaoyw@red.semi.ac.cn |
中文摘要 | deep level defects in as-grown and annealed si-inp samples were investigated by thermally stimulated current spectroscopy. correlations between electrical property, compensation ratio, thermal stability and deep defect concentration in si-inp were revealed. an optimized crystal growth condition for high quality si-inp was demonstrated based on the experimental results. |
英文摘要 | deep level defects in as-grown and annealed si-inp samples were investigated by thermally stimulated current spectroscopy. correlations between electrical property, compensation ratio, thermal stability and deep defect concentration in si-inp were revealed. an optimized crystal growth condition for high quality si-inp was demonstrated based on the experimental results.; zhangdi于2010-03-29批量导入; zhangdi于2010-03-29批量导入; chinese assoc crystal growth.; crystal mat shandong univ, state key lab.; cas, tech inst phys & chem.; res inst synthet crystal.; japanese soc promot sci, 161 comm.; chinese acad sci, inst semicond, beijing 100083, peoples r china |
收录类别 | 其他 |
会议主办者 | chinese assoc crystal growth.; crystal mat shandong univ, state key lab.; cas, tech inst phys & chem.; res inst synthet crystal.; japanese soc promot sci, 161 comm. |
会议录 | journal of rare earths
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会议录出版者 | metallurgical industry press ; 2 xinjiekouwai dajie, beijing 100088, peoples r china |
会议录出版地 | 2 xinjiekouwai dajie, beijing 100088, peoples r china |
学科主题 | 半导体材料 |
语种 | 英语 |
ISSN号 | 1002-0721 |
内容类型 | 会议论文 |
源URL | [http://ir.semi.ac.cn/handle/172111/10032] ![]() |
专题 | 半导体研究所_中国科学院半导体研究所(2009年前) |
推荐引用方式 GB/T 7714 | Zhao, YW,Dong, ZY,Duan, ML,et al. Growth of high quality semi-insulating InP single crystal by suppression of compensation defects[C]. 见:3rd asian conference on crystal growth and crystal technology (cgct-3). beijing, peoples r china. oct 16-19, 2005. |
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