Micro-fabricated Al0.3Ga0.7As pyramids for potential SPM applications

CORC > 半导体研究所 > 中国科学院半导体研究所 > 中国科学院半导体研究所（2009年前）

	Micro-fabricated Al0.3Ga0.7As pyramids for potential SPM applications
	Sun, J ; Hu, LZ ; Sun, YC ; Wang, ZY
	2004
会议名称	13th international conference on semiconducting and insulating materials (simc xiii)
会议日期	sep 20-25, 2004
会议地点	beijing, peoples r china
关键词	GROWTH
页码	172-175
通讯作者	sun, j, chinese acad sci, inst semicond, key lab semicond mat, beijing 100083, peoples r china.
中文摘要	a novel technique of manufacturing al0.3ga0.7as pyramids by liquid phase epitaxy (lpe) for scanning probe microscopy (spm) sensors is reported four meticulously designed conditions-partial oxidation, deficient solute, air quenching and germanium doping result in defect-free homogeneous nucleation and subsequent pyramid formation. micrometer-sized frustums and pyramids are detected by scanning electron microscopy (sem). the sharp end of the microtip has a radius of curvature smaller than 50 nm. it is believed that such accomplishments would contribute not only to crystal growth theory, but also to miniature fabrication technology.
英文摘要	a novel technique of manufacturing al0.3ga0.7as pyramids by liquid phase epitaxy (lpe) for scanning probe microscopy (spm) sensors is reported four meticulously designed conditions-partial oxidation, deficient solute, air quenching and germanium doping result in defect-free homogeneous nucleation and subsequent pyramid formation. micrometer-sized frustums and pyramids are detected by scanning electron microscopy (sem). the sharp end of the microtip has a radius of curvature smaller than 50 nm. it is believed that such accomplishments would contribute not only to crystal growth theory, but also to miniature fabrication technology.; zhangdi于2010-03-29批量导入; made available in dspace on 2010-03-29t06:06:17z (gmt). no. of bitstreams: 1 2343.pdf: 479635 bytes, checksum: 94e31ffd8382bc30b23e67cb7e27ba06 (md5) previous issue date: 2004; ieee electron devices soc.; chinese acad sci.; natl nat sci fdn china.; hakuto co ltd.; shenzhen oceans king investment imp & exp co.; shenzhen refond opt ele co ltd.; jiangsu nata optoelect mat co ltd.; beijing univ technol.; gen res inst nnferrous mat.; nanjing univ.; shanghai inst microsyst & informat technol.; sun yat univ.; shanghai inst microsyst & informat technol.; sun yat univ.; zhejiang univ.; dalian univ technol, state key lab mat modificat laser ion elect beams, dalian 116023, liaoning prov, peoples r china
收录类别	CPCI-S
会议主办者	ieee electron devices soc.; chinese acad sci.; natl nat sci fdn china.; hakuto co ltd.; shenzhen oceans king investment imp & exp co.; shenzhen refond opt ele co ltd.; jiangsu nata optoelect mat co ltd.; beijing univ technol.; gen res inst nnferrous mat.; nanjing univ.; shanghai inst microsyst & informat technol.; sun yat univ.; shanghai inst microsyst & informat technol.; sun yat univ.; zhejiang univ.
会议录	smic-xiii 2004 13th international conference on semiconducting & insulating materials
会议录出版者	ieee ; 345 e 47th st, new york, ny 10017 usa
会议录出版地	345 e 47th st, new york, ny 10017 usa
学科主题	半导体材料
语种	英语
ISBN号	0-7803-8668-x
内容类型	会议论文
源URL	[http://ir.semi.ac.cn/handle/172111/9922]
专题	半导体研究所_中国科学院半导体研究所（2009年前）
推荐引用方式 GB/T 7714	Sun, J,Hu, LZ,Sun, YC,et al. Micro-fabricated Al0.3Ga0.7As pyramids for potential SPM applications[C]. 见:13th international conference on semiconducting and insulating materials (simc xiii). beijing, peoples r china. sep 20-25, 2004.