Accurate vibration detection of a rough surface - art. no. 683118 | |
Zeng, HL ; Zhou, Y ; Fan, ST ; He, J | |
2008 | |
会议名称 | 2nd conference on nanophotonics, nanostructure and nanometrology |
会议日期 | nov 12-14, 2007 |
会议地点 | beijing, peoples r china |
关键词 | measurement of microvibration nanometrology interferometry vibration detection |
页码 | 6831: 83118-83118 |
通讯作者 | zeng, hl, chinese acad sci, inst semicond, beijing 100864, peoples r china. |
中文摘要 | based on the semiconductor laser whose spectral line with width is compressed to be less than 1.2mhz, a system was designed to measure and improve the amplitude and frequency of the real-time microvibration with sinusoidal modulation. real-time microvibration measurement was executed without alignment problem in the interferometry; and low-frequency disturbance of environment could be eliminated. suggestions were also given to consummate the system. the system also has resistance against the low frequency disturbance of the environment. |
英文摘要 | based on the semiconductor laser whose spectral line with width is compressed to be less than 1.2mhz, a system was designed to measure and improve the amplitude and frequency of the real-time microvibration with sinusoidal modulation. real-time microvibration measurement was executed without alignment problem in the interferometry; and low-frequency disturbance of environment could be eliminated. suggestions were also given to consummate the system. the system also has resistance against the low frequency disturbance of the environment.; zhangdi于2010-03-09批量导入; made available in dspace on 2010-03-09t02:11:55z (gmt). no. of bitstreams: 1 683.pdf: 223348 bytes, checksum: 5de468dfbd4084297fa8f3d3c983db79 (md5) previous issue date: 2008; spie.; chinese opt soc.; [zeng, hualin; zhou, yan; fan, songtao; he, jun] chinese acad sci, inst semicond, beijing 100864, peoples r china |
收录类别 | CPCI-S |
会议主办者 | spie.; chinese opt soc. |
会议录 | nanophotonics,nanostructure,and nanometrology ii
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会议录出版者 | spie-int soc optical engineering ; 1000 20th st, po box 10, bellingham, wa 98227-0010 usa |
会议录出版地 | 1000 20th st, po box 10, bellingham, wa 98227-0010 usa |
学科主题 | 光电子学 |
语种 | 英语 |
ISSN号 | 0277-786x |
ISBN号 | 978-0-8194-7006-5 |
内容类型 | 会议论文 |
源URL | [http://ir.semi.ac.cn/handle/172111/7808] ![]() |
专题 | 半导体研究所_中国科学院半导体研究所(2009年前) |
推荐引用方式 GB/T 7714 | Zeng, HL,Zhou, Y,Fan, ST,et al. Accurate vibration detection of a rough surface - art. no. 683118[C]. 见:2nd conference on nanophotonics, nanostructure and nanometrology. beijing, peoples r china. nov 12-14, 2007. |
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