Accurate vibration detection of a rough surface - art. no. 683118

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	Accurate vibration detection of a rough surface - art. no. 683118
	Zeng, HL ; Zhou, Y ; Fan, ST ; He, J
	2008
会议名称	2nd conference on nanophotonics, nanostructure and nanometrology
会议日期	nov 12-14, 2007
会议地点	beijing, peoples r china
关键词	measurement of microvibration nanometrology interferometry vibration detection
页码	6831: 83118-83118
通讯作者	zeng, hl, chinese acad sci, inst semicond, beijing 100864, peoples r china.
中文摘要	based on the semiconductor laser whose spectral line with width is compressed to be less than 1.2mhz, a system was designed to measure and improve the amplitude and frequency of the real-time microvibration with sinusoidal modulation. real-time microvibration measurement was executed without alignment problem in the interferometry; and low-frequency disturbance of environment could be eliminated. suggestions were also given to consummate the system. the system also has resistance against the low frequency disturbance of the environment.
英文摘要	based on the semiconductor laser whose spectral line with width is compressed to be less than 1.2mhz, a system was designed to measure and improve the amplitude and frequency of the real-time microvibration with sinusoidal modulation. real-time microvibration measurement was executed without alignment problem in the interferometry; and low-frequency disturbance of environment could be eliminated. suggestions were also given to consummate the system. the system also has resistance against the low frequency disturbance of the environment.; zhangdi于2010-03-09批量导入; made available in dspace on 2010-03-09t02:11:55z (gmt). no. of bitstreams: 1 683.pdf: 223348 bytes, checksum: 5de468dfbd4084297fa8f3d3c983db79 (md5) previous issue date: 2008; spie.; chinese opt soc.; [zeng, hualin; zhou, yan; fan, songtao; he, jun] chinese acad sci, inst semicond, beijing 100864, peoples r china
收录类别	CPCI-S
会议主办者	spie.; chinese opt soc.
会议录	nanophotonics,nanostructure,and nanometrology ii
会议录出版者	spie-int soc optical engineering ; 1000 20th st, po box 10, bellingham, wa 98227-0010 usa
会议录出版地	1000 20th st, po box 10, bellingham, wa 98227-0010 usa
学科主题	光电子学
语种	英语
ISSN号	0277-786x
ISBN号	978-0-8194-7006-5
内容类型	会议论文
源URL	[http://ir.semi.ac.cn/handle/172111/7808]
专题	半导体研究所_中国科学院半导体研究所（2009年前）
推荐引用方式 GB/T 7714	Zeng, HL,Zhou, Y,Fan, ST,et al. Accurate vibration detection of a rough surface - art. no. 683118[C]. 见:2nd conference on nanophotonics, nanostructure and nanometrology. beijing, peoples r china. nov 12-14, 2007.