| Micrograting Displacement Sensor with Integrated Electrostatic Actuation | |
| Yao Bao-Yin; Feng Li-Shuang; Wang Xiao; Liu Wei-Fang; Liu Mei-Hua | |
| 刊名 | CHINESE PHYSICS LETTERS
 |
| 2014 | |
| 卷号 | 31 |
| ISSN号 | 0256-307X |
| DOI | 10.1088/0256-307X/31/7/078501 |
| URL标识 | 查看原文 |
| 收录类别 | SCIE ; ISTICCSCD |
| WOS记录号 | WOS:000338982800054 |
| 内容类型 | 期刊论文 |
| URI标识 | http://www.corc.org.cn/handle/1471x/6560125 |
| 专题 | 北京航空航天大学 |
| 推荐引用方式 GB/T 7714 | Yao Bao-Yin,Feng Li-Shuang,Wang Xiao,et al. Micrograting Displacement Sensor with Integrated Electrostatic Actuation[J]. CHINESE PHYSICS LETTERS,2014,31. |
| APA | Yao Bao-Yin,Feng Li-Shuang,Wang Xiao,Liu Wei-Fang,&Liu Mei-Hua.(2014).Micrograting Displacement Sensor with Integrated Electrostatic Actuation.CHINESE PHYSICS LETTERS,31. |
| MLA | Yao Bao-Yin,et al."Micrograting Displacement Sensor with Integrated Electrostatic Actuation".CHINESE PHYSICS LETTERS 31(2014). |
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