Investigation of periodicity fluctuations in strained (GaNAs)(1)(GaAs)(m) superlattices by the kinematical simulation of x-ray diffraction

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	Investigation of periodicity fluctuations in strained (GaNAs)(1)(GaAs)(m) superlattices by the kinematical simulation of x-ray diffraction
	Pan Z ; Wang YT ; Zhuang Y ; Lin YW ; Zhou ZQ ; Li LH ; Wu RH ; Wang QM
刊名	applied physics letters
	1999
卷号	75 期号:2 页码:223-225
关键词	MOLECULAR-BEAM EPITAXY GAASN ALLOYS GROWTH ENERGY
ISSN号	0003-6951
通讯作者	pan z,chinese acad sci,inst semicond,pob 912,beijing 100083,peoples r china.
中文摘要	periodicity fluctuations of layer thickness and composition in a superlattice not only decrease the intensity, they also broaden the width of the satellite peaks in the x-ray diffraction pattern. in this letter, we develop a method that is dependent on the width of satellite peaks to assess periodicity fluctuations of a superlattice quickly. a linear relation of the magnitude of fluctuations, peak width and peak order has been derived from x-ray diffraction kinematical theory. by means of this method, periodicity fluctuations in strained (ganas)(1)(gaas)(m) superlattices grown on gaas substrates by molecular beam epitaxy have been studied. distinct satellite peaks indicate that the superlattices are of high quality. the n composition of 0.25 and its fluctuation of 20% in a strained ganxas1-x monolayer are obtained from simulations of the measured diffraction pattern. the x-ray simulations and in situ observation results of reflection high-energy electron diffraction are in good agreement. (c) 1999 american institute of physics. [s0003-6951(99)00828-1].
学科主题	半导体物理
收录类别	SCI
语种	英语
公开日期	2010-08-12
内容类型	期刊论文
源URL	[http://ir.semi.ac.cn/handle/172111/12872]
专题	半导体研究所_中国科学院半导体研究所（2009年前）
推荐引用方式 GB/T 7714	Pan Z,Wang YT,Zhuang Y,et al. Investigation of periodicity fluctuations in strained (GaNAs)(1)(GaAs)(m) superlattices by the kinematical simulation of x-ray diffraction[J]. applied physics letters,1999,75(2):223-225.
APA	Pan Z.,Wang YT.,Zhuang Y.,Lin YW.,Zhou ZQ.,...&Wang QM.(1999).Investigation of periodicity fluctuations in strained (GaNAs)(1)(GaAs)(m) superlattices by the kinematical simulation of x-ray diffraction.applied physics letters,75(2),223-225.
MLA	Pan Z,et al."Investigation of periodicity fluctuations in strained (GaNAs)(1)(GaAs)(m) superlattices by the kinematical simulation of x-ray diffraction".applied physics letters 75.2(1999):223-225.