A scanning measurement method of the pitch of grating based on Photoelectric Microscope | |
Gao Hongtang; Wang Zhongyu; Wang Hao | |
2015 | |
会议名称 | Annual Conference of the Chinese-Society-for-Optical-Engineering on Applied Optics and Photonics, China (AOPC) |
会议日期 | 2015-01-01 |
会议地点 | Beijing, PEOPLES R CHINA |
关键词 | Photoelectric Microscope Interferometer Scanning Method Gratings Calibration |
卷号 | 9671 |
收录类别 | EI ; CPCI-S |
URL标识 | 查看原文 |
WOS记录号 | WOS:000364657700036 |
内容类型 | 会议论文 |
URI标识 | http://www.corc.org.cn/handle/1471x/6540243 |
专题 | 北京航空航天大学 |
推荐引用方式 GB/T 7714 | Gao Hongtang,Wang Zhongyu,Wang Hao. A scanning measurement method of the pitch of grating based on Photoelectric Microscope[C]. 见:Annual Conference of the Chinese-Society-for-Optical-Engineering on Applied Optics and Photonics, China (AOPC). Beijing, PEOPLES R CHINA. 2015-01-01. |
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