Development and Application of a Micro-infrared Photoelasticity System for Stress Evaluation of Through-silicon Vias (TSV) | |
Su, Fei; Lan, Tianbao; Pan, Xiaoxu; Zhang, Zheng | |
2015 | |
会议名称 | 2015 IEEE 65TH ELECTRONIC COMPONENTS AND TECHNOLOGY CONFERENCE (ECTC) |
会议日期 | 2015-01-01 |
关键词 | Through-Silicon Vias (TSV) stress infrared photoelasticity finite element analysis hybrid method |
卷号 | 2015-July |
页码 | 1789-1794 |
收录类别 | EI ; CPCI-S |
URL标识 | 查看原文 |
WOS记录号 | WOS:000370285100279 |
内容类型 | 会议论文 |
URI标识 | http://www.corc.org.cn/handle/1471x/6536398 |
专题 | 北京航空航天大学 |
推荐引用方式 GB/T 7714 | Su, Fei,Lan, Tianbao,Pan, Xiaoxu,et al. Development and Application of a Micro-infrared Photoelasticity System for Stress Evaluation of Through-silicon Vias (TSV)[C]. 见:2015 IEEE 65TH ELECTRONIC COMPONENTS AND TECHNOLOGY CONFERENCE (ECTC). 2015-01-01. |
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