Application of the compatibility relationship(1) in seeking a functional relationship among species' equilibrium quantities in complex systems

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	Application of the compatibility relationship(1) in seeking a functional relationship among species' equilibrium quantities in complex systems
	Ren Y
刊名	journal of physical chemistry b
	2000
卷号	104 期号:40 页码:9500-9504
关键词	EPITAXIAL LAYERS SILICON GAAS
ISSN号	1089-5647
通讯作者	ren y,chinese acad sci,inst semicond,pob 912,beijing 100083,peoples r china.
中文摘要	a new algorithm, representing an important advance in determination of the functional relationship, is first reported here. the algorithm is very useful and convenient for analyzing the incorporation of impurities. to show how the algorithm works, two early and well-known vapor phase epitaxy (vpe) experiments-ashen's (ashen, d. j.; dean, p. j.; hurle, d. t. j.; mullin, j. b.; royle, a.; white, a. m. gallium arsenide and related compounds, institute of physics conference series 24, 1974; institute of physics: london, 1975; p 229.), involving the doping of silicon and dilorenzo's (dilorenzo, j. v. j. cryst. growth 1972, 17, 189.), involving the mole fraction effect-are calculated to find the functional relationship between the si contamination and the partial pressure of hcl. the calculated curves agree with the experimental results. a conclusion that the calculated values are greater than the true values has been drawn.
学科主题	半导体化学
收录类别	SCI
语种	英语
公开日期	2010-08-12
内容类型	期刊论文
源URL	[http://ir.semi.ac.cn/handle/172111/12388]
专题	半导体研究所_中国科学院半导体研究所（2009年前）
推荐引用方式 GB/T 7714	Ren Y. Application of the compatibility relationship(1) in seeking a functional relationship among species' equilibrium quantities in complex systems[J]. journal of physical chemistry b,2000,104(40):9500-9504.
APA	Ren Y.(2000).Application of the compatibility relationship(1) in seeking a functional relationship among species' equilibrium quantities in complex systems.journal of physical chemistry b,104(40),9500-9504.
MLA	Ren Y."Application of the compatibility relationship(1) in seeking a functional relationship among species' equilibrium quantities in complex systems".journal of physical chemistry b 104.40(2000):9500-9504.