Application of the compatibility relationship(1) in seeking a functional relationship among species' equilibrium quantities in complex systems | |
Ren Y | |
刊名 | journal of physical chemistry b
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2000 | |
卷号 | 104期号:40页码:9500-9504 |
关键词 | EPITAXIAL LAYERS SILICON GAAS |
ISSN号 | 1089-5647 |
通讯作者 | ren y,chinese acad sci,inst semicond,pob 912,beijing 100083,peoples r china. |
中文摘要 | a new algorithm, representing an important advance in determination of the functional relationship, is first reported here. the algorithm is very useful and convenient for analyzing the incorporation of impurities. to show how the algorithm works, two early and well-known vapor phase epitaxy (vpe) experiments-ashen's (ashen, d. j.; dean, p. j.; hurle, d. t. j.; mullin, j. b.; royle, a.; white, a. m. gallium arsenide and related compounds, institute of physics conference series 24, 1974; institute of physics: london, 1975; p 229.), involving the doping of silicon and dilorenzo's (dilorenzo, j. v. j. cryst. growth 1972, 17, 189.), involving the mole fraction effect-are calculated to find the functional relationship between the si contamination and the partial pressure of hcl. the calculated curves agree with the experimental results. a conclusion that the calculated values are greater than the true values has been drawn. |
学科主题 | 半导体化学 |
收录类别 | SCI |
语种 | 英语 |
公开日期 | 2010-08-12 |
内容类型 | 期刊论文 |
源URL | [http://ir.semi.ac.cn/handle/172111/12388] ![]() |
专题 | 半导体研究所_中国科学院半导体研究所(2009年前) |
推荐引用方式 GB/T 7714 | Ren Y. Application of the compatibility relationship(1) in seeking a functional relationship among species' equilibrium quantities in complex systems[J]. journal of physical chemistry b,2000,104(40):9500-9504. |
APA | Ren Y.(2000).Application of the compatibility relationship(1) in seeking a functional relationship among species' equilibrium quantities in complex systems.journal of physical chemistry b,104(40),9500-9504. |
MLA | Ren Y."Application of the compatibility relationship(1) in seeking a functional relationship among species' equilibrium quantities in complex systems".journal of physical chemistry b 104.40(2000):9500-9504. |
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