Structural characterization of cubic GaN grown on GaAs(001) substrates | |
Zheng XH ; Qu B ; Wang YT ; Yang H ; Liang JW ; Han JY | |
刊名 | chinese journal of electronics
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2001 | |
卷号 | 10期号:2页码:219-222 |
关键词 | cubic GaN X-ray double crystal diffraction structural characteristics CONTINUOUS-WAVE OPERATION EPITAXIAL-GROWTH HEXAGONAL GAN LASER-DIODES THIN-FILMS MBE |
ISSN号 | 1022-4653 |
通讯作者 | zheng xh,chinese acad sci,inst semicond,beijing 100083,peoples r china. |
中文摘要 | structural characteristics of cubic gan epilayers grown on gaas(001) were studied using x-ray double-crystal diffraction technique. the structure factors of cubic gan(002) and (004) components are approximately identical. however, the integrated intensities of the rocking curve for cubic (002) components are over five times as those of (004) components. the discrepancy has been interpreted in detail considering other factors. in the conventional double crystal rocking curve, the peak broadening includes such information caused by the orientation distribution (mosaicity) and the distribution of lattice spacing. these two kinds of distributions can be distinguished by the triple-axis diffraction in which an analyser crystal is placed in front of the detector. moreover, the peak broadening was analysed by reciprocal lattice construction and eward sphere. by using triple-axis diffraction of cubic (002) and (113) components, domain size and dislocation density were estimated. the fully relaxed lattice parameter of cubic gan was determined to be about 0.451 +/- 0.001nm. |
学科主题 | 半导体材料 |
收录类别 | SCI |
语种 | 英语 |
公开日期 | 2010-08-12 |
内容类型 | 期刊论文 |
源URL | [http://ir.semi.ac.cn/handle/172111/12230] ![]() |
专题 | 半导体研究所_中国科学院半导体研究所(2009年前) |
推荐引用方式 GB/T 7714 | Zheng XH,Qu B,Wang YT,et al. Structural characterization of cubic GaN grown on GaAs(001) substrates[J]. chinese journal of electronics,2001,10(2):219-222. |
APA | Zheng XH,Qu B,Wang YT,Yang H,Liang JW,&Han JY.(2001).Structural characterization of cubic GaN grown on GaAs(001) substrates.chinese journal of electronics,10(2),219-222. |
MLA | Zheng XH,et al."Structural characterization of cubic GaN grown on GaAs(001) substrates".chinese journal of electronics 10.2(2001):219-222. |
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