Fast deposition of diamond-like carbon films by radio frequency hollow cathode method

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	Fast deposition of diamond-like carbon films by radio frequency hollow cathode method
	Pang XL; Peng HL; Yang HS; Gao KW; Wu XL(武晓雷); Volinsky AA
刊名	THIN SOLID FILMS
	2013-05-01
通讯作者邮箱	pangxl@mater.ustb.edu.cn
卷号	534 页码:226-230
关键词	Diamond-like carbon films Hollow cathode Deposition rate Raman spectra Nanohardness
ISSN号	0040-6090
通讯作者	Yang, HS (reprint author), Univ Sci & Technol Beijing, Dept Mat Phys & Chem, Beijing 100083, Peoples R China.
产权排序	[Pang, Xiaolu; Peng, Haili; Yang, Huisheng; Gao, Kewei] Univ Sci & Technol Beijing, Dept Mat Phys & Chem, Beijing 100083, Peoples R China; [Wu, Xiaolei] Chinese Acad Sci, State Key Lab Nonlinear Mech, Beijing 100080, Peoples R China; [Volinsky, Alex A.] Univ S Florida, Dept Mech Engn, Tampa, FL 33620 USA
合作状况	国际
中文摘要	Diamond-like carbon (DLC) thin films were deposited on p-type Si (100) substrates by RF hollow cathode method under different RF power and pressure, using ethane as the precursor gas. The deposition rate of 45 nm/min was achieved, almost 4 times higher than by conventional radio frequency plasma enhanced chemical vapor deposition. The mechanism of fast DLC films deposition is attributed to high plasma density in RF hollow cathode method, discussed in this paper. Scanning electron microscopy and Raman spectroscopy were used to investigate the microstructure of DLC films. The film hardness and Young's modulus were measured by nanoindentation.
学科主题	固体力学
分类号	二类/Q2
收录类别	SCI ; EI
资助信息	National Nature Science Foundation of China [51001013, 51271022]; Fok Ying Tung Education Foundation [132001]; Fundamental Research Funds for the Central Universities
原文出处	http://dx.doi.org/10.1016/j.tsf.2013.02.123
语种	英语
WOS记录号	WOS:000317736700038
公开日期	2013-05-31
内容类型	期刊论文
源URL	[http://dspace.imech.ac.cn/handle/311007/47262]
专题	力学研究所_非线性力学国家重点实验室
推荐引用方式 GB/T 7714	Pang XL,Peng HL,Yang HS,et al. Fast deposition of diamond-like carbon films by radio frequency hollow cathode method[J]. THIN SOLID FILMS,2013,534:226-230.
APA	Pang XL,Peng HL,Yang HS,Gao KW,Wu XL,&Volinsky AA.(2013).Fast deposition of diamond-like carbon films by radio frequency hollow cathode method.THIN SOLID FILMS,534,226-230.
MLA	Pang XL,et al."Fast deposition of diamond-like carbon films by radio frequency hollow cathode method".THIN SOLID FILMS 534(2013):226-230.