Enhancement of 1.53 mu m photoluminescence from spin-coated Er-Si-O (Er2SiO5) crystalline films by nitrogen plasma treatment

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	Enhancement of 1.53 mu m photoluminescence from spin-coated Er-Si-O (Er2SiO5) crystalline films by nitrogen plasma treatment
	Wang XX ; Zhang JG ; Cheng BW ; Yu JZ ; Wang QM
刊名	journal of crystal growth
	2006
卷号	289 期号:1 页码:178-182
关键词	photoluminescence spin-coating rare earth compounds MU-M SILICON ERBIUM ZNO
ISSN号	0022-0248
通讯作者	wang, xx, chinese acad sci, inst semicond, state key lab integrated optoelect, beijing 100083, peoples r china. e-mail: wangxiaoxin@red.semi.ac.cn
中文摘要	er-si-o (er2sio5) crystalline films are fabricated by the spin-coating and subsequent annealing process. the fraction of erbium is estimated to be 21.5 at% based on rutherford backscattering measurement. x-ray diffraction pattern indicates that the er-si-o films are similar to er2sio5 compound in the crystal structure. the fine structure of room-temperature photoluminescence of er3+-related transitions suggests that er has a local environment similar to the er-o-6 octahedron. our preliminary results show that the intensity of 1.53 mu m emission is enhanced by a factor of seven after nitrogen plasma treatment by nh3 gas with subsequent post-annealing. the full-width at half-maximum of 1.53 pm emission peak increases from 7.5 to 12.9 nm compared with that of the untreated one. nitrogen plasma treatment is assumed to tailor er3+ local environment, increasing the oscillator strength of transitions and thus the excitation/emission cross-section. (c) 2005 elsevier b.v. all rights reserved.
学科主题	光电子学
收录类别	SCI
语种	英语
公开日期	2010-04-11
内容类型	期刊论文
源URL	[http://ir.semi.ac.cn/handle/172111/10780]
专题	半导体研究所_中国科学院半导体研究所（2009年前）
推荐引用方式 GB/T 7714	Wang XX,Zhang JG,Cheng BW,et al. Enhancement of 1.53 mu m photoluminescence from spin-coated Er-Si-O (Er2SiO5) crystalline films by nitrogen plasma treatment[J]. journal of crystal growth,2006,289(1):178-182.
APA	Wang XX,Zhang JG,Cheng BW,Yu JZ,&Wang QM.(2006).Enhancement of 1.53 mu m photoluminescence from spin-coated Er-Si-O (Er2SiO5) crystalline films by nitrogen plasma treatment.journal of crystal growth,289(1),178-182.
MLA	Wang XX,et al."Enhancement of 1.53 mu m photoluminescence from spin-coated Er-Si-O (Er2SiO5) crystalline films by nitrogen plasma treatment".journal of crystal growth 289.1(2006):178-182.