Micro-mould method for self-assembling three-dimensional opal photonic crystals

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	Micro-mould method for self-assembling three-dimensional opal photonic crystals
	Han PD
刊名	journal of physics d-applied physics
	2006
卷号	39 期号:10 页码:2100-2104
关键词	BANDGAP CRYSTALS CIRCUITS LIGHT
ISSN号	0022-3727
通讯作者	ye, zc, chinese acad sci, inst semicond, qinghua e rd,jia 35, beijing 100083, peoples r china. e-mail: yzhch@red.semi.ac.cn
中文摘要	by vertical sedimentation, silica micro-spheres were grown in different shapes of concave micro-zones which were etched on a (100) p-silicon substrate. the following were found: this method can effectively raise the quality of films by avoiding cracks; the geometry of the micro-zones affects the sediment of the film; regular hexagons and triangles best facilitate the growth of photonic crystals. this method is practical for its ability to fabricate self-assembly photonic crystals in previously designed small areas.
学科主题	光电子学
收录类别	SCI
语种	英语
公开日期	2010-04-11
内容类型	期刊论文
源URL	[http://ir.semi.ac.cn/handle/172111/10606]
专题	半导体研究所_中国科学院半导体研究所（2009年前）
推荐引用方式 GB/T 7714	Han PD. Micro-mould method for self-assembling three-dimensional opal photonic crystals[J]. journal of physics d-applied physics,2006,39(10):2100-2104.
APA	Han PD.(2006).Micro-mould method for self-assembling three-dimensional opal photonic crystals.journal of physics d-applied physics,39(10),2100-2104.
MLA	Han PD."Micro-mould method for self-assembling three-dimensional opal photonic crystals".journal of physics d-applied physics 39.10(2006):2100-2104.