A micromachined SiO2/silicon probe for neural signal recordings

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	A micromachined SiO2/silicon probe for neural signal recordings
	Sui XH (Sui Xiao-Hong) ; Pei WH (Pei Wei-Hua) ; Zhang RX (Zhang Ruo-Xin) ; Lu L (Lu Lin) ; Chen HD (Chen Hong-Da)
刊名	chinese physics letters
	2006
卷号	23 期号:7 页码:1932-1934
ISSN号	0256-307x
通讯作者	sui, xh, chinese acad sci, inst semicond, state key lab integrated optoelect, beijing 100083, peoples r china. e-mail: xhsui@mail.semi.ac.cn
中文摘要	the development of an implantable five channel microelectrode array is presented for neural signal recordings. the detailed fabrication process is outlined with four masked used. the sem images show that the probe shank is 1.2mm long, 100 mu m wide and 30 mu m thick with the recording sites spaced 200 mu m apart for good signal isolation. the plot of the single recording site impedance versus frequency is shown by test in vitro and the ompedence declines with the increasing frequency. experiment in vivo using this probe is under way.
学科主题	光电子学
收录类别	SCI
语种	英语
公开日期	2010-04-11
内容类型	期刊论文
源URL	[http://ir.semi.ac.cn/handle/172111/10514]
专题	半导体研究所_中国科学院半导体研究所（2009年前）
推荐引用方式 GB/T 7714	Sui XH ,Pei WH ,Zhang RX ,et al. A micromachined SiO2/silicon probe for neural signal recordings[J]. chinese physics letters,2006,23(7):1932-1934.
APA	Sui XH ,Pei WH ,Zhang RX ,Lu L ,&Chen HD .(2006).A micromachined SiO2/silicon probe for neural signal recordings.chinese physics letters,23(7),1932-1934.
MLA	Sui XH ,et al."A micromachined SiO2/silicon probe for neural signal recordings".chinese physics letters 23.7(2006):1932-1934.