Effect of oxidation on the optical and surface properties of AlGaN

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	Effect of oxidation on the optical and surface properties of AlGaN
	Wang XL (Wang X. L.) ; Zhao DG (Zhao D. G.) ; Chen J (Chen J.) ; Li XY (Li X. Y.) ; Gong HM (Gong H. M.) ; Yang H (Yang H.)
刊名	applied surface science
	2006
卷号	252 期号:24 页码:8706-8709
关键词	oxidation AlGaN surface morphology RAY PHOTOELECTRON-SPECTROSCOPY HIGH-POWER GAN OXIDE
ISSN号	0169-4332
通讯作者	wang, xl, chinese acad sci, inst semicond, state key lab integrated optoelect, pob 912, beijing 100083, peoples r china. e-mail: wxl@mail.semi.ac.cn
中文摘要	the chemical properties of alxga1-xn surfaces exposed to air for different time periods are investigated by atomic force microscopy (afm), photoluminescence (pl) measurement and x-ray photoelectron spectroscopy (xps). pl and afm results show that alxga1-xn samples exhibit different surface characteristics for different air-exposure times and al contents. the xps spectra of the al 2p and ga 2p core levels indicate that the peaks shifted slightly, from an al-n to an al-o bond and from a ga-n to a ga-o bond. all of these results show that the epilayer surface contains a large amount of ga and al oxides. (c) 2006 elsevier b.v. all rights reserved.
学科主题	光电子学
收录类别	SCI
语种	英语
公开日期	2010-04-11
内容类型	期刊论文
源URL	[http://ir.semi.ac.cn/handle/172111/10306]
专题	半导体研究所_中国科学院半导体研究所（2009年前）
推荐引用方式 GB/T 7714	Wang XL ,Zhao DG ,Chen J ,et al. Effect of oxidation on the optical and surface properties of AlGaN[J]. applied surface science,2006,252(24):8706-8709.
APA	Wang XL ,Zhao DG ,Chen J ,Li XY ,Gong HM ,&Yang H .(2006).Effect of oxidation on the optical and surface properties of AlGaN.applied surface science,252(24),8706-8709.
MLA	Wang XL ,et al."Effect of oxidation on the optical and surface properties of AlGaN".applied surface science 252.24(2006):8706-8709.