Effect of oxidation on the optical and surface properties of AlGaN | |
Wang XL (Wang X. L.) ; Zhao DG (Zhao D. G.) ; Chen J (Chen J.) ; Li XY (Li X. Y.) ; Gong HM (Gong H. M.) ; Yang H (Yang H.) | |
刊名 | applied surface science
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2006 | |
卷号 | 252期号:24页码:8706-8709 |
关键词 | oxidation AlGaN surface morphology RAY PHOTOELECTRON-SPECTROSCOPY HIGH-POWER GAN OXIDE |
ISSN号 | 0169-4332 |
通讯作者 | wang, xl, chinese acad sci, inst semicond, state key lab integrated optoelect, pob 912, beijing 100083, peoples r china. e-mail: wxl@mail.semi.ac.cn |
中文摘要 | the chemical properties of alxga1-xn surfaces exposed to air for different time periods are investigated by atomic force microscopy (afm), photoluminescence (pl) measurement and x-ray photoelectron spectroscopy (xps). pl and afm results show that alxga1-xn samples exhibit different surface characteristics for different air-exposure times and al contents. the xps spectra of the al 2p and ga 2p core levels indicate that the peaks shifted slightly, from an al-n to an al-o bond and from a ga-n to a ga-o bond. all of these results show that the epilayer surface contains a large amount of ga and al oxides. (c) 2006 elsevier b.v. all rights reserved. |
学科主题 | 光电子学 |
收录类别 | SCI |
语种 | 英语 |
公开日期 | 2010-04-11 |
内容类型 | 期刊论文 |
源URL | [http://ir.semi.ac.cn/handle/172111/10306] ![]() |
专题 | 半导体研究所_中国科学院半导体研究所(2009年前) |
推荐引用方式 GB/T 7714 | Wang XL ,Zhao DG ,Chen J ,et al. Effect of oxidation on the optical and surface properties of AlGaN[J]. applied surface science,2006,252(24):8706-8709. |
APA | Wang XL ,Zhao DG ,Chen J ,Li XY ,Gong HM ,&Yang H .(2006).Effect of oxidation on the optical and surface properties of AlGaN.applied surface science,252(24),8706-8709. |
MLA | Wang XL ,et al."Effect of oxidation on the optical and surface properties of AlGaN".applied surface science 252.24(2006):8706-8709. |
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