ZnO thin films on Si(111) grown by pulsed laser deposition from metallic Zn target

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	ZnO thin films on Si(111) grown by pulsed laser deposition from metallic Zn target
	Zhao J (Zhao Jie) ; Hu LZ (Hu Lizhong) ; Wang ZY (Wang Zhaoyang) ; Sun J (Sun Jie) ; Wang ZJ (Wang Zhijun)
刊名	applied surface science
	2006
卷号	253 期号:2 页码:841-845
关键词	ZnO pulsed laser deposition oxygen pressure annealing X-ray diffraction photoluminescence ULTRAVIOLET EMISSION ROOM-TEMPERATURE ZINC-OXIDE
ISSN号	0169-4332
通讯作者	zhao, j, dalian univ technol, state key lab mat modificat laser ion electron be, dept phys, dalian 116024, peoples r china. e-mail: jiezhao@student.dlut.edu.cn
中文摘要	zno thin films with highly c-axis orientation have been fabricated on p-type si(1 1 1) substrates at 400 degrees c by pulsed laser deposition (pld) from a metallic zn target with oxygen pressures between 0.1 and 0.7 mbar. experimental results indicate that the films deposited at 0.3 and 0.5 mbar have better crystalline and optical quality and flatter surfaces than the films prepared at other pressures. the full width at half maximum (fwhm) of (0 0 0 2) diffraction peak decreases remarkably from 0.46 to 0.19 degrees with increasing annealing temperature for the film prepared at 0.3 mbar. in photoluminescence (pl) spectra at room temperature, the annealed film at 700 degrees c exhibits a smaller ultraviolet (uv) peak fwhm of 108 mev than the as-grown film (119 mev). however, an enhanced deep-level emission is observed. possible origins to above results are discussed. (c) 2006 elsevier b.v. all rights reserved.
学科主题	半导体材料
收录类别	SCI
语种	英语
公开日期	2010-04-11
内容类型	期刊论文
源URL	[http://ir.semi.ac.cn/handle/172111/10242]
专题	半导体研究所_中国科学院半导体研究所（2009年前）
推荐引用方式 GB/T 7714	Zhao J ,Hu LZ ,Wang ZY ,et al. ZnO thin films on Si(111) grown by pulsed laser deposition from metallic Zn target[J]. applied surface science,2006,253(2):841-845.
APA	Zhao J ,Hu LZ ,Wang ZY ,Sun J ,&Wang ZJ .(2006).ZnO thin films on Si(111) grown by pulsed laser deposition from metallic Zn target.applied surface science,253(2),841-845.
MLA	Zhao J ,et al."ZnO thin films on Si(111) grown by pulsed laser deposition from metallic Zn target".applied surface science 253.2(2006):841-845.