Three-Dimensional Numerical Simulation of Phase-Change Memory Cell with Probe like Bottom Electrode Structure

	Three-Dimensional Numerical Simulation of Phase-Change Memory Cell with Probe like Bottom Electrode Structure
	Liu, Y ; song, zt(重点实验室） ; Ling, Y ; Gong, YF ; Feng, SL(重点实验室）
刊名	JAPANESE JOURNAL OF APPLIED PHYSICS
	2009
卷号	48 期号:2 页码:24502
关键词	Physics Applied
ISSN号	0021-4922
学科主题	Physics
收录类别	SCI
原文出处	10.1143/JJAP.48.024502
语种	英语
公开日期	2013-05-10
内容类型	期刊论文
源URL	[http://ir.sim.ac.cn/handle/331004/115444]
专题	上海微系统与信息技术研究所_信息功能材料国家重点实验室2008-2012_期刊论文
推荐引用方式 GB/T 7714	Liu, Y,song, zt,Ling, Y,et al. Three-Dimensional Numerical Simulation of Phase-Change Memory Cell with Probe like Bottom Electrode Structure[J]. JAPANESE JOURNAL OF APPLIED PHYSICS,2009,48(2):24502.
APA	Liu, Y,song, zt,Ling, Y,Gong, YF,&Feng, SL.(2009).Three-Dimensional Numerical Simulation of Phase-Change Memory Cell with Probe like Bottom Electrode Structure.JAPANESE JOURNAL OF APPLIED PHYSICS,48(2),24502.
MLA	Liu, Y,et al."Three-Dimensional Numerical Simulation of Phase-Change Memory Cell with Probe like Bottom Electrode Structure".JAPANESE JOURNAL OF APPLIED PHYSICS 48.2(2009):24502.