Design and Fabrication of a Photonic Crystal Channel Drop Filter Based on an Asymmetric Silicon-on-Insulator Slab | |
Yu HJ ; Yu JZ ; Yu YD ; Chen SW | |
刊名 | journal of nanoscience and nanotechnology
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2009 | |
卷号 | 9期号:2页码:974-977 |
关键词 | Photonic Crystal (PC) Channel-Drop Filter Silicon-on-Insulator (SOI) |
ISSN号 | 1533-4880 |
通讯作者 | yu hj beijing univ posts & telecommun minist educ key lab opt commun & lightwave technol beijing 100876 peoples r china. |
中文摘要 | we report on the design and fabrication of a photonic crystal (pc) channel drop filter based on an asymmetric silicon-on-insulator (soi) slab. the filter is composed of two symmetric stick-shape micro-cavities between two single-line-defect (w1) waveguides in a triangular lattice, and the phase matching condition for the filter to improve the drop efficiency is satisfied by modifying the positions and radii of the air holes around the micro-cavities. a sample is then fabricated by using electron beam lithography (ebl) and inductively coupled plasma (icp) etching processes. the measured 0 factor of the filter is about 1140, and the drop efficiency is estimated to be 73% +/- 5% by fitting the transmission spectrum. |
学科主题 | 半导体化学 |
收录类别 | SCI |
语种 | 英语 |
公开日期 | 2010-03-08 |
内容类型 | 期刊论文 |
源URL | [http://ir.semi.ac.cn/handle/172111/7327] ![]() |
专题 | 半导体研究所_中国科学院半导体研究所(2009年前) |
推荐引用方式 GB/T 7714 | Yu HJ,Yu JZ,Yu YD,et al. Design and Fabrication of a Photonic Crystal Channel Drop Filter Based on an Asymmetric Silicon-on-Insulator Slab[J]. journal of nanoscience and nanotechnology,2009,9(2):974-977. |
APA | Yu HJ,Yu JZ,Yu YD,&Chen SW.(2009).Design and Fabrication of a Photonic Crystal Channel Drop Filter Based on an Asymmetric Silicon-on-Insulator Slab.journal of nanoscience and nanotechnology,9(2),974-977. |
MLA | Yu HJ,et al."Design and Fabrication of a Photonic Crystal Channel Drop Filter Based on an Asymmetric Silicon-on-Insulator Slab".journal of nanoscience and nanotechnology 9.2(2009):974-977. |
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