Design and Fabrication of a Photonic Crystal Channel Drop Filter Based on an Asymmetric Silicon-on-Insulator Slab
Yu HJ ; Yu JZ ; Yu YD ; Chen SW
刊名journal of nanoscience and nanotechnology
2009
卷号9期号:2页码:974-977
关键词Photonic Crystal (PC) Channel-Drop Filter Silicon-on-Insulator (SOI)
ISSN号1533-4880
通讯作者yu hj beijing univ posts & telecommun minist educ key lab opt commun & lightwave technol beijing 100876 peoples r china.
中文摘要we report on the design and fabrication of a photonic crystal (pc) channel drop filter based on an asymmetric silicon-on-insulator (soi) slab. the filter is composed of two symmetric stick-shape micro-cavities between two single-line-defect (w1) waveguides in a triangular lattice, and the phase matching condition for the filter to improve the drop efficiency is satisfied by modifying the positions and radii of the air holes around the micro-cavities. a sample is then fabricated by using electron beam lithography (ebl) and inductively coupled plasma (icp) etching processes. the measured 0 factor of the filter is about 1140, and the drop efficiency is estimated to be 73% +/- 5% by fitting the transmission spectrum.
学科主题半导体化学
收录类别SCI
语种英语
公开日期2010-03-08
内容类型期刊论文
源URL[http://ir.semi.ac.cn/handle/172111/7327]  
专题半导体研究所_中国科学院半导体研究所(2009年前)
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GB/T 7714
Yu HJ,Yu JZ,Yu YD,et al. Design and Fabrication of a Photonic Crystal Channel Drop Filter Based on an Asymmetric Silicon-on-Insulator Slab[J]. journal of nanoscience and nanotechnology,2009,9(2):974-977.
APA Yu HJ,Yu JZ,Yu YD,&Chen SW.(2009).Design and Fabrication of a Photonic Crystal Channel Drop Filter Based on an Asymmetric Silicon-on-Insulator Slab.journal of nanoscience and nanotechnology,9(2),974-977.
MLA Yu HJ,et al."Design and Fabrication of a Photonic Crystal Channel Drop Filter Based on an Asymmetric Silicon-on-Insulator Slab".journal of nanoscience and nanotechnology 9.2(2009):974-977.
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