A comparison of silicon oxide and nitride as host matrices on the photoluminescence from Er3+ ions

CORC > 半导体研究所 > 中国科学院半导体研究所 > 中国科学院半导体研究所（2009年前）

	A comparison of silicon oxide and nitride as host matrices on the photoluminescence from Er3+ ions
	Ding WC ; Liu Y ; Zhang Y ; Guo JC ; Zuo YH ; Cheng BW ; Yu JZ ; Wang QM
刊名	chinese physics b
	2009
卷号	18 期号:7 页码:3044-3048
关键词	Er doping silicon nitride photoluminescence
ISSN号	1674-1056
通讯作者	ding wc chinese acad sci inst semicond state key lab integrated optoelect beijing 100083 peoples r china. e-mail address: wcd04@semi.ac.cn
中文摘要	this paper compares the properties of silicon oxide and nitride as host matrices for er ions. erbium-doped silicon nitride films were deposited by a plasma-enhanced chemical-vapour deposition system. after deposition, the films were implanted with er3+ at different doses. er-doped thermal grown silicon oxide films were prepared at the same time as references. photoluminescence features of er3+ were inspected systematically. it is found that silicon nitride films are suitable for high concentration doping and the thermal quenching effect is not severe. however, a very high annealing temperature up to 1200 degrees c is needed to optically activate er3+ which may be the main obstacle to impede the application of er-doped silicon nitride.
学科主题	光电子学
收录类别	SCI
资助信息	national natural science foundation of china 60336010 major state basic research program of china 2006cb302802 2007cb613404 project supported by the national natural science foundation of china (grant no 60336010) and the major state basic research program of china (grant nos 2006cb302802 and 2007cb613404).
语种	英语
公开日期	2010-03-08
内容类型	期刊论文
源URL	[http://ir.semi.ac.cn/handle/172111/7107]
专题	半导体研究所_中国科学院半导体研究所（2009年前）
推荐引用方式 GB/T 7714	Ding WC,Liu Y,Zhang Y,et al. A comparison of silicon oxide and nitride as host matrices on the photoluminescence from Er3+ ions[J]. chinese physics b,2009,18(7):3044-3048.
APA	Ding WC.,Liu Y.,Zhang Y.,Guo JC.,Zuo YH.,...&Wang QM.(2009).A comparison of silicon oxide and nitride as host matrices on the photoluminescence from Er3+ ions.chinese physics b,18(7),3044-3048.
MLA	Ding WC,et al."A comparison of silicon oxide and nitride as host matrices on the photoluminescence from Er3+ ions".chinese physics b 18.7(2009):3044-3048.