Effect of silver growth temperature on the contacts between Ag and ZnO thin films

CORC > 半导体研究所 > 中国科学院半导体研究所 > 中国科学院半导体研究所（2009年前）

	Effect of silver growth temperature on the contacts between Ag and ZnO thin films
	Li XK
刊名	science in china series e-technological sciences
	2009
卷号	52 期号:9 页码:2779-2784
关键词	ZnO Schottky barrier interface MSM structure
ISSN号	1006-9321
通讯作者	li xk qufu normal univ coll phys & engn qufu 273165 peoples r china. e-mail address: phylxk@163.com
中文摘要	highly c-axis oriented zno thin films were deposited on si substrates by the pulsed laser deposition (pld) method. at different growth temperatures, 200 nm silver films as the contact metal were deposited on the zno thin films. the growth temperatures have great influence on the crystal quality of ag films. current-voltage characteristics were measured at room temperature. the schottky contacts between ag and zno thin films were successfully obtained when silver electrodes were deposited at 150a degrees c and 200a degrees c. ohmic contacts were formed while the growth temperatures were lower than 150a degrees c or higher than 200a degrees c. after analysis, the forming of ag/zno schottky contacts was shown to be dependent on the appearance of the p-type inversion layer at the interface between ag and zno layers.
学科主题	半导体材料
收录类别	SCI
语种	英语
公开日期	2010-03-08
内容类型	期刊论文
源URL	[http://ir.semi.ac.cn/handle/172111/7021]
专题	半导体研究所_中国科学院半导体研究所（2009年前）
推荐引用方式 GB/T 7714	Li XK. Effect of silver growth temperature on the contacts between Ag and ZnO thin films[J]. science in china series e-technological sciences,2009,52(9):2779-2784.
APA	Li XK.(2009).Effect of silver growth temperature on the contacts between Ag and ZnO thin films.science in china series e-technological sciences,52(9),2779-2784.
MLA	Li XK."Effect of silver growth temperature on the contacts between Ag and ZnO thin films".science in china series e-technological sciences 52.9(2009):2779-2784.