Design, fabrication and characterization of a high-performance microring resonator in silicon-on-insulator

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	Design, fabrication and characterization of a high-performance microring resonator in silicon-on-insulator
	Chen SW; Fan ZC; Han WH
刊名	chinese physics b
	2008
卷号	17 期号:7 页码:2562-2566
关键词	integrated photonics
ISSN号	1674-1056
通讯作者	huang, qz, chinese acad sci, inst semicond, natl key lab integrated optoelect, beijing 100083, peoples r china. 电子邮箱地址: jzyu@red.semi.ac.cn
中文摘要	a high-performance microring resonator in a silicon-on-insulator rib waveguide is realized by using the electron beam lithography followed by inductively coupled plasma etching. the design and the experimental realization of this device are presented in detail. in addition to improving relevant processes to minimize propagation loss, the coupling efficiency between the ring and the bus is carefully chosen to approach a critical coupling for high performance operating. we have measured a quality factor of 21,200 and an extinction ratio of 12.5db at a resonant wavelength of 1549.32nm. meanwhile, a low propagation loss of 0.89db/mm in a curved waveguide with a bending radius of 40 mu m is demonstrated as well.
学科主题	半导体器件
收录类别	SCI
语种	英语
公开日期	2010-03-08
内容类型	期刊论文
源URL	[http://ir.semi.ac.cn/handle/172111/6556]
专题	半导体研究所_中国科学院半导体研究所（2009年前）
推荐引用方式 GB/T 7714	Chen SW,Fan ZC,Han WH. Design, fabrication and characterization of a high-performance microring resonator in silicon-on-insulator[J]. chinese physics b,2008,17(7):2562-2566.
APA	Chen SW,Fan ZC,&Han WH.(2008).Design, fabrication and characterization of a high-performance microring resonator in silicon-on-insulator.chinese physics b,17(7),2562-2566.
MLA	Chen SW,et al."Design, fabrication and characterization of a high-performance microring resonator in silicon-on-insulator".chinese physics b 17.7(2008):2562-2566.