Simulation demonstration and experimental fabrication of a multiple-slot waveguide

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	Simulation demonstration and experimental fabrication of a multiple-slot waveguide
	Tu, XG ; Xu, XJ ; Chen, SW ; Yu, JZ ; Wang, QM
刊名	ieee photonics technology letters
	2008
卷号	20 期号:39941 页码:333-335
关键词	dielectric waveguides silicon-on-insulator technology
ISSN号	1041-1135
通讯作者	tu, xg, chinese acad sci, inst semicond, state key lab integrated optoelect, beijing 100083, peoples r china. 电子邮箱地址: tuxiaog@red.semi.ac.cn
中文摘要	a multiple-slot waveguide is presented and demonstrated through theoretical simulation. taking a double-slot waveguide as an example, the results show a nearly 30% enhancement of optical intensity compared with the traditional single-slot waveguide with the same slot gap width. therefore, the e-field intensity of the slot can be increased by adding another smaller slot. a double-slot waveguide with oxide and air as low index slot materials is realized experimentally and the formation processes of the slots are analyzed.
学科主题	微电子学
收录类别	SCI
语种	英语
公开日期	2010-03-08
内容类型	期刊论文
源URL	[http://ir.semi.ac.cn/handle/172111/6548]
专题	半导体研究所_中国科学院半导体研究所（2009年前）
推荐引用方式 GB/T 7714	Tu, XG,Xu, XJ,Chen, SW,et al. Simulation demonstration and experimental fabrication of a multiple-slot waveguide[J]. ieee photonics technology letters,2008,20(39941):333-335.
APA	Tu, XG,Xu, XJ,Chen, SW,Yu, JZ,&Wang, QM.(2008).Simulation demonstration and experimental fabrication of a multiple-slot waveguide.ieee photonics technology letters,20(39941),333-335.
MLA	Tu, XG,et al."Simulation demonstration and experimental fabrication of a multiple-slot waveguide".ieee photonics technology letters 20.39941(2008):333-335.