Monolithic Integration of Pressure Plus Acceleration Composite TPMS Sensors With a Single-Sided Micromachining Technology

	Monolithic Integration of Pressure Plus Acceleration Composite TPMS Sensors With a Single-Sided Micromachining Technology
	Wang, JC ; Xia, XY ; Li, XX
刊名	JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
	2012
卷号	21 期号:2 页码:284-293
关键词	Accelerometer front-side monolithic micromachining piezoresistance pressure sensor sensor
ISSN号	1057-7157
通讯作者	Wang, JC (reprint author), Chinese Acad Sci, Shanghai Inst Microsyst & Informat Technol, State Key Lab Transducer Technol & Sci, Shanghai 200050, Peoples R China.
中文摘要	This paper concerns the development of a single-side micromachined tire-pressure monitoring system (TPMS) sensor for automobiles, which is with a piezoresistive pressure sensor and a cantilever-mass piezoresistive accelerometer monolithically integrated i
学科主题	Engineering
收录类别	2012SCI-152
原文出处	10.1109/JMEMS.2011.2178117
语种	英语
公开日期	2013-04-23
内容类型	期刊论文
源URL	[http://ir.sim.ac.cn/handle/331004/114921]
专题	上海微系统与信息技术研究所_微系统技术_期刊论文
推荐引用方式 GB/T 7714	Wang, JC,Xia, XY,Li, XX. Monolithic Integration of Pressure Plus Acceleration Composite TPMS Sensors With a Single-Sided Micromachining Technology[J]. JOURNAL OF MICROELECTROMECHANICAL SYSTEMS,2012,21(2):284-293.
APA	Wang, JC,Xia, XY,&Li, XX.(2012).Monolithic Integration of Pressure Plus Acceleration Composite TPMS Sensors With a Single-Sided Micromachining Technology.JOURNAL OF MICROELECTROMECHANICAL SYSTEMS,21(2),284-293.
MLA	Wang, JC,et al."Monolithic Integration of Pressure Plus Acceleration Composite TPMS Sensors With a Single-Sided Micromachining Technology".JOURNAL OF MICROELECTROMECHANICAL SYSTEMS 21.2(2012):284-293.