CMOS MEMS-based thermoelectric generator with an efficient heat dissipation path

	CMOS MEMS-based thermoelectric generator with an efficient heat dissipation path
	Yu, X ; Wang, YC ; Liu, YX ; Li, T ; Zhou, H ; Gao, XL ; Feng, F ; Roinila, T ; Wang, YL
刊名	JOURNAL OF MICROMECHANICS AND MICROENGINEERING
	2012
卷号	22 期号:10 页码:105011
ISSN号	0960-1317
通讯作者	Yu, X (reprint author), Chinese Acad Sci, Shanghai Inst Microsyst & Informat Technol, State Key Lab Transducer Technol, Shanghai 200050, Peoples R China.
中文摘要	This paper presents a CMOS MEMS-based thermoelectric energy generator (TEG) device with an efficient heat dissipation path. For present CMOS MEMS-based thermoelectric generator devices, the output performance is greatly limited by the high thermal-contact
学科主题	Engineering; Science & Technology - Other Topics; Instruments & Instrumentation; Materials Science; Mechanics
收录类别	2012SCI-041
原文出处	10.1088/0960-1317/22/10/105011
语种	英语
公开日期	2013-04-23
内容类型	期刊论文
源URL	[http://ir.sim.ac.cn/handle/331004/114899]
专题	上海微系统与信息技术研究所_微系统技术_期刊论文
推荐引用方式 GB/T 7714	Yu, X,Wang, YC,Liu, YX,et al. CMOS MEMS-based thermoelectric generator with an efficient heat dissipation path[J]. JOURNAL OF MICROMECHANICS AND MICROENGINEERING,2012,22(10):105011.
APA	Yu, X.,Wang, YC.,Liu, YX.,Li, T.,Zhou, H.,...&Wang, YL.(2012).CMOS MEMS-based thermoelectric generator with an efficient heat dissipation path.JOURNAL OF MICROMECHANICS AND MICROENGINEERING,22(10),105011.
MLA	Yu, X,et al."CMOS MEMS-based thermoelectric generator with an efficient heat dissipation path".JOURNAL OF MICROMECHANICS AND MICROENGINEERING 22.10(2012):105011.