Microstructure and mechanical properties of Mo/DLC nanocomposite ﬁlms

CORC > 兰州化学物理研究所 > 中国科学院兰州化学物理研究所 > 固体润滑国家重点实验室

	Microstructure and mechanical properties of Mo/DLC nanocomposite ﬁlms
	Zhou HD(周惠娣); Li HX(李红轩); Ji L(吉利); Chen JM(陈建敏); Chen JM(陈建敏)
刊名	Diamond and Related Materials
	2008
卷号	17 页码:1949-1954
关键词	Diamond-like carbon Composites Nanostructures Mechanical properties
ISSN号	0925-9635
通讯作者	陈建敏
中文摘要	Mo-doped diamond-like carbon (Mo/DLC) films were deposited on stainless steel and Si wafer substrates via unbalanced magnetron sputtering of molybdenum combined with inductively coupled radio frequency (RF) plasma chemical vapor deposition of CH4/Ar. The effects of Mo doping and sputtering current on the microstructure and mechanical properties of the as-deposited filmswere investigated bymeans of X-ray photoelectron spectroscopy (XPS), X-ray diffraction (XRD), transmission electron microscopy (TEM), Raman spectroscopy, atomic forcemicroscopy (AFM), and nano-indentation. It was found that Mo doping led to increase in the content of sp2 carbon, and hence decreased the hardness and elastic modulus of Mo/DLC films as compared with that of DLC films. The content ofMoin the films increased with the increasing sputtering current, and most of Moreacted with C atoms to formMoC nanocrystallites at a higher sputtering current. Moreover, theMo-doped DLC films had greatlydecreased internal stress and increased adhesion to the substrate than the DLC film,which could be closely related to the unique nanocomposite structure of theMo-doped films. Namely, the Mo/DLC filmwas composed of MoC nanoparticles embedded in the cross-linked amorphous carbon matrix, and such a kind of nanostructure was beneficial to retaining the loss of hardness and elastic modulus.
学科主题	材料科学与物理化学
收录类别	SCI
资助信息	the National Natural Science Foundation of China (Nos. 50705093;50575217);Innovative Group Foundation from NSFC (No. 50421502);“973” Project (No. 2007CB607601);the foundational scientiﬁc research of China (No.A1320060604)
语种	英语
公开日期	2013-03-28
内容类型	期刊论文
源URL	[http://210.77.64.217/handle/362003/2599]
专题	兰州化学物理研究所_固体润滑国家重点实验室兰州化学物理研究所_先进润滑与防护材料研究发展中心
通讯作者	Chen JM(陈建敏); Chen JM(陈建敏)
推荐引用方式 GB/T 7714	Zhou HD,Li HX,Ji L,et al. Microstructure and mechanical properties of Mo/DLC nanocomposite ﬁlms[J]. Diamond and Related Materials,2008,17:1949-1954.
APA	周惠娣,李红轩,吉利,陈建敏,&陈建敏.(2008).Microstructure and mechanical properties of Mo/DLC nanocomposite ﬁlms.Diamond and Related Materials,17,1949-1954.
MLA	周惠娣,et al."Microstructure and mechanical properties of Mo/DLC nanocomposite ﬁlms".Diamond and Related Materials 17(2008):1949-1954.