Microstructure and mechanical properties of Mo/DLC nanocomposite films | |
Zhou HD(周惠娣)![]() ![]() ![]() ![]() ![]() | |
刊名 | Diamond and Related Materials
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2008 | |
卷号 | 17页码:1949-1954 |
关键词 | Diamond-like carbon Composites Nanostructures Mechanical properties |
ISSN号 | 0925-9635 |
通讯作者 | 陈建敏 |
中文摘要 | Mo-doped diamond-like carbon (Mo/DLC) films were deposited on stainless steel and Si wafer substrates via unbalanced magnetron sputtering of molybdenum combined with inductively coupled radio frequency (RF) plasma chemical vapor deposition of CH4/Ar. The effects of Mo doping and sputtering current on the microstructure and mechanical properties of the as-deposited filmswere investigated bymeans of X-ray photoelectron spectroscopy (XPS), X-ray diffraction (XRD), transmission electron microscopy (TEM), Raman spectroscopy, atomic forcemicroscopy (AFM), and nano-indentation. It was found that Mo doping led to increase in the content of sp2 carbon, and hence decreased the hardness and elastic modulus of Mo/DLC films as compared with that of DLC films. The content ofMoin the films increased with the increasing sputtering current, and most of Moreacted with C atoms to formMoC nanocrystallites at a higher sputtering current. Moreover, theMo-doped DLC films had greatlydecreased internal stress and increased adhesion to the substrate than the DLC film,which could be closely related to the unique nanocomposite structure of theMo-doped films. Namely, the Mo/DLC filmwas composed of MoC nanoparticles embedded in the cross-linked amorphous carbon matrix, and such a kind of nanostructure was beneficial to retaining the loss of hardness and elastic modulus. |
学科主题 | 材料科学与物理化学 |
收录类别 | SCI |
资助信息 | the National Natural Science Foundation of China (Nos. 50705093;50575217);Innovative Group Foundation from NSFC (No. 50421502);“973” Project (No. 2007CB607601);the foundational scientific research of China (No.A1320060604) |
语种 | 英语 |
公开日期 | 2013-03-28 |
内容类型 | 期刊论文 |
源URL | [http://210.77.64.217/handle/362003/2599] ![]() |
专题 | 兰州化学物理研究所_固体润滑国家重点实验室 兰州化学物理研究所_先进润滑与防护材料研究发展中心 |
通讯作者 | Chen JM(陈建敏); Chen JM(陈建敏) |
推荐引用方式 GB/T 7714 | Zhou HD,Li HX,Ji L,et al. Microstructure and mechanical properties of Mo/DLC nanocomposite films[J]. Diamond and Related Materials,2008,17:1949-1954. |
APA | 周惠娣,李红轩,吉利,陈建敏,&陈建敏.(2008).Microstructure and mechanical properties of Mo/DLC nanocomposite films.Diamond and Related Materials,17,1949-1954. |
MLA | 周惠娣,et al."Microstructure and mechanical properties of Mo/DLC nanocomposite films".Diamond and Related Materials 17(2008):1949-1954. |
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