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	Assessment of surface roughness by use of soft x-ray scattering (EI CONFERENCE)
	Yan-li M. ; Yong-gang W. ; Shu-yan C. ; Bo C.
	2009
会议名称	Soft X-Ray Lasers and Applications VIII, August 4, 2009 - August 6, 2009
会议地点	San Diego, CA, United states
关键词	A soft x-ray reflectometer with laser produced plasma source has been designed which can work from wavelength 8nm to 30 nm and has high performance. Using the soft x-ray reflectometer above the scattering light distribution of silicon and zerodur mirrors which have super-smooth surfaces could be measured at different incidence angle and different wavelength. The measurement when the incidence angle is 2 degree and the wavelength is 1 lnm has been given in this paper. A surface scattering theory of soft x-ray grazing incidence optics based on linear system theory and an inverse scattering mathematical model is introduced. The vector scattering theory of soft x-ray scattering also is stated in detail. The scattering data are analyzed by both the methods above respectively to give information about the surface profiles. On the other hand both the two samples are measured by WYKO surface profiler and the surface roughness of the silicon and zerodur mirror is 1.3 nm and 1.5nm respectively. The calculated results are in quantitative agreement with those measured by WYKO surface profiler which indicates that soft x-ray scattering is a very useful tool for the evaluation of highly polished surfaces. But there still some difference among the results of different theory and WYKO and the possible reasons of such difference have been discussed in detail. 2009 SPIE.
收录类别	EI
内容类型	会议论文
源URL	[http://ir.ciomp.ac.cn/handle/181722/33920]
专题	长春光学精密机械与物理研究所_中科院长春光机所知识产出_会议论文
推荐引用方式 GB/T 7714	Yan-li M.,Yong-gang W.,Shu-yan C.,et al. Assessment of surface roughness by use of soft x-ray scattering (EI CONFERENCE)[C]. 见:Soft X-Ray Lasers and Applications VIII, August 4, 2009 - August 6, 2009. San Diego, CA, United states.

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